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Apparatus for producing semiconductor device
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Patent number 4,934,920
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Issue date Jun 19, 1990
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Mitsubishi Denki Kabushiki Kaisha
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Shunji Yamauchi
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B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Wrist device of industrial robot
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Patent number 4,684,313
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Issue date Aug 4, 1987
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Mitsubishi Denki Kabushiki Kaisha
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Yoshihiko Minematsu
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Industrial robot
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Patent number 4,627,786
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Issue date Dec 9, 1986
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Mitsubishi Denki Kabushiki Kaisha
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Yoshihiko Minematsu
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS