Misuo Sugiyama

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Hadano, JP

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Patents Grantslast 30 patents

Information Patent Grant
Carriers and polishing apparatus
- Patent number 6,273,803
- Issue date Aug 14, 2001
- SpeedFam Co., Ltd.
- Xu-Jin Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,210,260
- Issue date Apr 3, 2001
- SpeedFam Co., Ltd.
- Hideo Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,012,964
- Issue date Jan 11, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Flattening method and flattening apparatus of a semiconductor device
- Patent number 5,605,499
- Issue date Feb 25, 1997
- Speedfam Company Limited
- Misuo Sugiyama
- B24 - GRINDING POLISHING
Information Patent Grant
Flat lapping machine with sizing mechanism
- Patent number 5,099,614
- Issue date Mar 31, 1992
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Flat lapping machine
- Patent number 4,805,348
- Issue date Feb 21, 1989
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING