Mitsuaki Komino

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electrode, susceptor, plasma processing apparatus and method of mak...
- Patent number 7,337,745
- Issue date Mar 4, 2008
- Tokyo Electron Limited
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and electrode structure and table stru...
- Patent number 7,033,444
- Issue date Apr 25, 2006
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transfer module and cluster system for semiconductor manufacturing...
- Patent number 6,634,845
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Mitsuaki Komino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,544,380
- Issue date Apr 8, 2003
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,431,115
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,379,756
- Issue date Apr 30, 2002
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,264,788
- Issue date Jul 24, 2001
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for controlling gas system
- Patent number 6,167,323
- Issue date Dec 26, 2000
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor generating method and apparatus using same
- Patent number 6,157,774
- Issue date Dec 5, 2000
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 6,156,151
- Issue date Dec 5, 2000
- Tokyo Electron Limited
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying processing method and apparatus using same
- Patent number 6,134,807
- Issue date Oct 24, 2000
- Tokyo Electron Limited
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for controlling pressure and flow rate
- Patent number 6,131,307
- Issue date Oct 17, 2000
- Tokyo Electron Limited
- Mitsuaki Komino
- F26 - DRYING
Information Patent Grant
Plasma treatment method utilizing an amplitude-modulated high frequ...
- Patent number 6,106,737
- Issue date Aug 22, 2000
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced pressure and normal pressure treatment apparatus
- Patent number 5,769,952
- Issue date Jun 23, 1998
- Tokyo Electron, Ltd.
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment apparatus
- Patent number 5,753,891
- Issue date May 19, 1998
- Tokyo Electron Limited
- Teruo Iwata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 5,665,166
- Issue date Sep 9, 1997
- Tokyo Electron Limited
- Youichi Deguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment apparatus control method
- Patent number 5,660,740
- Issue date Aug 26, 1997
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck
- Patent number 5,625,526
- Issue date Apr 29, 1997
- Tokyo Electron Limited
- Masahide Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Treatment apparatus control method
- Patent number 5,584,971
- Issue date Dec 17, 1996
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a bonding portion
- Patent number 5,581,874
- Issue date Dec 10, 1996
- Tokyo Electron Limited
- Makoto Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum exhaust system for processing apparatus
- Patent number 5,575,853
- Issue date Nov 19, 1996
- Tokyo Electron Limited
- Junichi Arami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling temperature of susceptor
- Patent number 5,567,267
- Issue date Oct 22, 1996
- Tokyo Electron Limited
- Kouichi Kazama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma process apparatus
- Patent number 5,478,429
- Issue date Dec 26, 1995
- Tokyo Electron Limited
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage having electrostatic chuck and plasma processing apparatus us...
- Patent number 5,382,311
- Issue date Jan 17, 1995
- Tokyo Electron Limited
- Kenji Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 5,376,213
- Issue date Dec 27, 1994
- Tokyo Electron Limited
- Yoichi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEATING APPARATUS
- Publication number 20100200566
- Publication date Aug 12, 2010
- EAGLE INDUSTRY co, Ltd.
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS FOR ORGANIC EL AND EVAPORATING APPARATUS
- Publication number 20100000469
- Publication date Jan 7, 2010
- TOKYO ELECTRON LIMITED
- Yasushi Yagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC FLUID SEAL DEVICE
- Publication number 20090179385
- Publication date Jul 16, 2009
- EAGLE INDUSTRY CO., LTD.
- Mitsuaki Komino
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Semiconductor manufacturing device and its heating unit
- Publication number 20070034159
- Publication date Feb 15, 2007
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma treatment method and apparatus
- Publication number 20020088547
- Publication date Jul 11, 2002
- TOKYO ELECTRON LIMITED
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processor, cluster tool, and method of controlling plasma
- Publication number 20010054484
- Publication date Dec 27, 2001
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma treatment method and apparatus
- Publication number 20010027843
- Publication date Oct 11, 2001
- TOKYO ELECTRON LIMITED
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment method and apparatus
- Publication number 20010023744
- Publication date Sep 27, 2001
- TOKYO ELECTRON LIMITED
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mitsuaki Komino

Person

Patents Grantslast 30 patents

Electrode, susceptor, plasma processing apparatus and method of mak...

Plasma processing apparatus, and electrode structure and table stru...

Transfer module and cluster system for semiconductor manufacturing...

Plasma treatment method and apparatus

Plasma treatment method and apparatus

Plasma treatment method and apparatus

Plasma treatment method and apparatus

Method and system for controlling gas system

Vapor generating method and apparatus using same

Plasma processing apparatus

Drying processing method and apparatus using same

Method and device for controlling pressure and flow rate

Plasma treatment method utilizing an amplitude-modulated high frequ...

Reduced pressure and normal pressure treatment apparatus

Treatment apparatus

Plasma processing apparatus

Treatment apparatus control method

Electrostatic chuck

Treatment apparatus control method

Method of forming a bonding portion

Vacuum exhaust system for processing apparatus

Method of controlling temperature of susceptor

Plasma process apparatus

Stage having electrostatic chuck and plasma processing apparatus us...

Plasma processing apparatus

Patents Applicationslast 30 patents

HEATING APPARATUS

DEPOSITION APPARATUS FOR ORGANIC EL AND EVAPORATING APPARATUS

MAGNETIC FLUID SEAL DEVICE

Semiconductor manufacturing device and its heating unit

Plasma treatment method and apparatus

Plasma processor, cluster tool, and method of controlling plasma

Plasma treatment method and apparatus

Plasma treatment method and apparatus