Mitsugu Sato

Person

Hitachinaka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for adjusting charged particle beam device and adjusting bea...
- Patent number 10,176,968
- Issue date Jan 8, 2019
- Hitachi High-Technologies Corporation
- Kunji Shigeto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, specimen observation system and op...
- Patent number 10,020,163
- Issue date Jul 10, 2018
- Hitachi High-Technologies Corporation
- Yayoi Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, specimen observation system and op...
- Patent number 9,792,832
- Issue date Oct 17, 2017
- Hitachi High-Technologies Corporation
- Yayoi Konishi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus, specimen observation system and op...
- Patent number 9,443,694
- Issue date Sep 13, 2016
- Hitachi High-Technologies Corporation
- Yayoi Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,208,995
- Issue date Dec 8, 2015
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle radiation device with bandpass detection
- Patent number 9,202,667
- Issue date Dec 1, 2015
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for correcting diffraction aberration of electron beam
- Patent number 9,123,501
- Issue date Sep 1, 2015
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,058,957
- Issue date Jun 16, 2015
- Hitachi High-Technologies Corporation
- Kunji Shigeto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 9,040,911
- Issue date May 26, 2015
- Hitachi High-Technologies Corporation
- Takeshi Ogashiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,629,395
- Issue date Jan 14, 2014
- Hitachi High-Technologies Corporation
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 8,604,430
- Issue date Dec 10, 2013
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 8,431,893
- Issue date Apr 30, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam equipment and charged particle microscopy
- Patent number 8,304,722
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection and charged particle beam apparatus
- Patent number 8,304,723
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- G01 - MEASURING TESTING
Information Patent Grant
Battery charger
- Patent number 8,299,760
- Issue date Oct 30, 2012
- Sony Corporation
- Mitsugu Sato
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Scanning electron microscope and method of imaging an object by usi...
- Patent number 8,222,601
- Issue date Jul 17, 2012
- Hitachi High-Technologies Corporation
- Ichiro Tachibana
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,217,363
- Issue date Jul 10, 2012
- Hitachi High-Technologies Corporation
- Michio Hatano
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 8,207,498
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and methods for capturing images us...
- Patent number 8,207,512
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 8,153,969
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,153,970
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Hirohiko Kitsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of an inspection system using an electron beam
- Patent number 8,134,125
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and dimension measuring method
- Patent number 8,030,614
- Issue date Oct 4, 2011
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for charged particle bea...
- Patent number 8,026,491
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Takeshi Ogashiwa
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and dimension measuring method
- Patent number 7,973,282
- Issue date Jul 5, 2011
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 7,964,845
- Issue date Jun 21, 2011
- Hitachi High-Technologies Corporation
- Yuusuke Tanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus for forming a specimen image
- Patent number 7,956,324
- Issue date Jun 7, 2011
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and sample manufacturing method
- Patent number 7,928,377
- Issue date Apr 19, 2011
- Hitachi High-Technologies Corporation
- Tohru Ishitani
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam equipment
- Patent number 7,923,701
- Issue date Apr 12, 2011
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method of imaging an object by usi...
- Patent number 7,888,640
- Issue date Feb 15, 2011
- Hitachi High-Technologies Corporation
- Ichiro Tachibana
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OP...
- Publication number 20160343542
- Publication date Nov 24, 2016
- Hitachi High-Technologies Corporation
- Yayoi Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Method for Adjusting Charged Parti...
- Publication number 20160118218
- Publication date Apr 28, 2016
- Hitachi High-Technologies Corporation
- Kunji SHIGETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device, Sample Observation Method, Sample Pla...
- Publication number 20160025659
- Publication date Jan 28, 2016
- Hitachi High-Technologies Corporation
- Yusuke OMINAMI
- G01 - MEASURING TESTING
Information Patent Application
Scanning Electron Microscope
- Publication number 20150108351
- Publication date Apr 23, 2015
- Hitachi High-Technologies Corporation
- Takeshi Ogashiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OP...
- Publication number 20150076348
- Publication date Mar 19, 2015
- Hitachi High-Technologies Corporation
- Yayoi Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OP...
- Publication number 20150074523
- Publication date Mar 12, 2015
- Hitachi High-Technologies Corporation
- Yayoi Konishi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150014530
- Publication date Jan 15, 2015
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140131590
- Publication date May 15, 2014
- Kunji Shigeto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR CORRECTING DIFFRACTION ABERRATION OF ELECTRON BEAM
- Publication number 20140124664
- Publication date May 8, 2014
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE RADIATION DEVICE
- Publication number 20130043388
- Publication date Feb 21, 2013
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20120298864
- Publication date Nov 29, 2012
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Apparatus and Electron Beam Inspection Method
- Publication number 20120261574
- Publication date Oct 18, 2012
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...
- Publication number 20120132801
- Publication date May 31, 2012
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...
- Publication number 20110133080
- Publication date Jun 9, 2011
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Apparatus And Electron Beam Inspection Method
- Publication number 20110101223
- Publication date May 5, 2011
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND METHOD OF IMAGING AN OBJECT BY USI...
- Publication number 20110095184
- Publication date Apr 28, 2011
- Hitachi High-Technologies Corporation
- Ichiro TACHIBANA
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20100320385
- Publication date Dec 23, 2010
- Hitachi High-Technologies Corporation
- Hirohiko Kitsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATTERY CHARGER
- Publication number 20100225281
- Publication date Sep 9, 2010
- SONY CORPORATION
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20100187416
- Publication date Jul 29, 2010
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- G01 - MEASURING TESTING
Information Patent Application
Substrate Processing Apparatus
- Publication number 20100168909
- Publication date Jul 1, 2010
- CANON ANELVA CORPORATION
- Mitsugu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND DIMENSION MEASURING METHOD
- Publication number 20090314938
- Publication date Dec 24, 2009
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam equipment
- Publication number 20090242794
- Publication date Oct 1, 2009
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM
- Publication number 20090184255
- Publication date Jul 23, 2009
- Hitachi High-Technologies Corporation
- Atsuko FUKADA
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE APPLICATION APPARATUS
- Publication number 20090101817
- Publication date Apr 23, 2009
- Takashi OHSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM EQUIPMENT AND CHARGED PARTICLE MICROSCOPY
- Publication number 20090084955
- Publication date Apr 2, 2009
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM
- Publication number 20090057556
- Publication date Mar 5, 2009
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam device
- Publication number 20090050803
- Publication date Feb 26, 2009
- Yuusuke Tanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090050805
- Publication date Feb 26, 2009
- Hitachi High-Technologies Corporation
- Hirohiko Kitsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and specimen holder
- Publication number 20080315097
- Publication date Dec 25, 2008
- Hitachi High-Technologies Corporation
- Hiroyuki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND METHOD OF IMAGING AN OBJECT BY USI...
- Publication number 20080310704
- Publication date Dec 18, 2008
- Hitachi High-Technologies Corporation
- Ichiro TACHIBANA
- G01 - MEASURING TESTING

Mitsugu Sato

Person

Patents Grantslast 30 patents

Method for adjusting charged particle beam device and adjusting bea...

Charged particle beam apparatus, specimen observation system and op...

Charged particle beam apparatus, specimen observation system and op...

Charged particle beam apparatus, specimen observation system and op...

Charged particle beam apparatus

Charged particle radiation device with bandpass detection

Device for correcting diffraction aberration of electron beam

Charged particle beam apparatus

Scanning electron microscope

Charged particle beam apparatus

Method and an apparatus of an inspection system using an electron beam

Electron beam apparatus and electron beam inspection method

Charged particle beam equipment and charged particle microscopy

Defect inspection and charged particle beam apparatus

Battery charger

Scanning electron microscope and method of imaging an object by usi...

Scanning electron microscope

Electron beam apparatus and electron beam inspection method

Charged particle beam apparatus and methods for capturing images us...

Inspection method and inspection system using charged particle beam

Scanning electron microscope

Method and apparatus of an inspection system using an electron beam

Charged particle beam apparatus and dimension measuring method

Charged particle beam apparatus and method for charged particle bea...

Charged particle beam apparatus and dimension measuring method

Charged particle beam device

Charged particle beam apparatus for forming a specimen image

Charged particle beam apparatus and sample manufacturing method

Charged particle beam equipment

Scanning electron microscope and method of imaging an object by usi...

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OP...

Charged Particle Beam Device and Method for Adjusting Charged Parti...

Charged Particle Beam Device, Sample Observation Method, Sample Pla...

Scanning Electron Microscope

CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OP...

CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OP...

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS

DEVICE FOR CORRECTING DIFFRACTION ABERRATION OF ELECTRON BEAM

CHARGED PARTICLE RADIATION DEVICE

Charged Particle Beam Apparatus

Electron Beam Apparatus and Electron Beam Inspection Method

METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...

CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...

Electron Beam Apparatus And Electron Beam Inspection Method

SCANNING ELECTRON MICROSCOPE AND METHOD OF IMAGING AN OBJECT BY USI...

SCANNING ELECTRON MICROSCOPE

BATTERY CHARGER

DEFECT INSPECTION AND CHARGED PARTICLE BEAM APPARATUS

Substrate Processing Apparatus

CHARGED PARTICLE BEAM APPARATUS AND DIMENSION MEASURING METHOD

Charged particle beam equipment

INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM

CHARGED PARTICLE APPLICATION APPARATUS

CHARGED PARTICLE BEAM EQUIPMENT AND CHARGED PARTICLE MICROSCOPY

METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM

Charged particle beam device

SCANNING ELECTRON MICROSCOPE

Charged particle beam apparatus and specimen holder

SCANNING ELECTRON MICROSCOPE AND METHOD OF IMAGING AN OBJECT BY USI...