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Mitsunori Komatsu
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Fujisawa-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
System for adjusting pad surface temperature and polishing apparatus
Patent number
11,992,915
Issue date
May 28, 2024
Ebara Corporation
Shuji Uozumi
B24 - GRINDING POLISHING
Information
Patent Grant
Leak detection system and inspection method for the system
Patent number
11,898,940
Issue date
Feb 13, 2024
Ebara Corporation
Toru Maruyama
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus and method for detecting abnormality...
Patent number
10,903,101
Issue date
Jan 26, 2021
Ebara Corporation
Mitsunori Komatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for regulating surface temperature of polishin...
Patent number
10,414,018
Issue date
Sep 17, 2019
Ebara Corporation
Toru Maruyama
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate cleaning apparatus and substrate cleaning method
Patent number
10,373,845
Issue date
Aug 6, 2019
Ebara Corporation
Fujihiko Toyomasu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
9,373,528
Issue date
Jun 21, 2016
Ebara Corporation
Toru Maruyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for cleaning polishing surface of polisher
Patent number
6,758,728
Issue date
Jul 6, 2004
Ebara Corporation
Tatsuo Inoue
B24 - GRINDING POLISHING
Information
Patent Grant
Pure water reusing system
Patent number
6,508,695
Issue date
Jan 21, 2003
Ebara Corporation
Mutsumi Tanikawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for cleaning polishing surface of polisher
Patent number
6,443,816
Issue date
Sep 3, 2002
Ebara Corporation
Tatsuo Inoue
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for supplying polishing liquid
Patent number
6,338,671
Issue date
Jan 15, 2002
Ebara Corporation
Kiyotaka Kawashima
B24 - GRINDING POLISHING
Information
Patent Grant
Filter apparatus
Patent number
6,280,300
Issue date
Aug 28, 2001
Ebara Corporation
Mitsunori Komatsu
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
LEAK DETECTION SYSTEM AND INSPECTION METHOD FOR THE SYSTEM
Publication number
20220034745
Publication date
Feb 3, 2022
EBARA CORPORATION
Toru Maruyama
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM FOR ADJUSTING PAD SURFACE TEMPERATURE AND POLISHING APPARATUS
Publication number
20210170545
Publication date
Jun 10, 2021
EBARA CORPORATION
SHUJI UOZUMI
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF REGULATING A SURFACE TEMPERATURE OF POLISHING PAD, AND PO...
Publication number
20190308293
Publication date
Oct 10, 2019
EBARA CORPORATION
Keisuke Kamiki
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...
Publication number
20170239778
Publication date
Aug 24, 2017
EBARA CORPORATION
Toru MARUYAMA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR DETECTING ABNORMALITY...
Publication number
20160315002
Publication date
Oct 27, 2016
EBARA CORPORATION
Mitsunori KOMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20140345658
Publication date
Nov 27, 2014
EBARA CORPORATION
Toru Maruyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20140216505
Publication date
Aug 7, 2014
Fujihiko TOYOMASU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for cleaning polishing surface of polisher
Publication number
20020197944
Publication date
Dec 26, 2002
Tatsuo Inoue
B24 - GRINDING POLISHING
Information
Patent Application
Pure water reusing system
Publication number
20010034190
Publication date
Oct 25, 2001
Mutsumi Tanikawa
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for cleaning polishing surface of polisher
Publication number
20010021625
Publication date
Sep 13, 2001
Tatsuo Inoue
B24 - GRINDING POLISHING