Mitsunori Toyoda

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 10,281,632
- Issue date May 7, 2019
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 10,073,203
- Issue date Sep 11, 2018
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 10,025,194
- Issue date Jul 17, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 9,989,685
- Issue date Jun 5, 2018
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 9,885,872
- Issue date Feb 6, 2018
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 9,823,478
- Issue date Nov 21, 2017
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam transforming optical system, illumination optical apparatus, e...
- Patent number 9,684,175
- Issue date Jun 20, 2017
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 9,684,176
- Issue date Jun 20, 2017
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,513,558
- Issue date Dec 6, 2016
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 9,176,267
- Issue date Nov 3, 2015
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 9,170,357
- Issue date Oct 27, 2015
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Grant
Beam transforming optical system, illumination optical apparatus, e...
- Patent number 9,170,356
- Issue date Oct 27, 2015
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and exposure me...
- Patent number 9,164,209
- Issue date Oct 20, 2015
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,749,759
- Issue date Jun 10, 2014
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,305,552
- Issue date Nov 6, 2012
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,139,198
- Issue date Mar 20, 2012
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminant distribution evaluation method, optical member manufactu...
- Patent number 7,618,767
- Issue date Nov 17, 2009
- Nikon Corporation
- Mitsunori Toyoda
- G01 - MEASURING TESTING
Information Patent Grant
Optical integrator, illumination optical device, exposure apparatus...
- Patent number 7,379,160
- Issue date May 27, 2008
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Grant
Illumination optical device, photolithography machine, and exposure...
- Patent number 7,307,693
- Issue date Dec 11, 2007
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffractive optical device, refractive optical device, illumination...
- Patent number 7,095,560
- Issue date Aug 22, 2006
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical illumination device, exposure device and exposure method
- Patent number 6,913,373
- Issue date Jul 5, 2005
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical integrator, illumination optical apparatus, exposure appara...
- Patent number 6,741,394
- Issue date May 25, 2004
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20180348643
- Publication date Dec 6, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BEAM TRANSFORMING OPTICAL SYSTEM, ILLUMINATION OPTICAL APPARATUS, E...
- Publication number 20170351100
- Publication date Dec 7, 2017
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20170082925
- Publication date Mar 23, 2017
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BEAM TRANSFORMING OPTICAL SYSTEM, ILLUMINATION OPTICAL APPARATUS, E...
- Publication number 20150338663
- Publication date Nov 26, 2015
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20140240685
- Publication date Aug 28, 2014
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BEAM TRANSFORMING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE...
- Publication number 20130242394
- Publication date Sep 19, 2013
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Exposure Apparatus, Exposure Method, and Method for Producing Device
- Publication number 20130027682
- Publication date Jan 31, 2013
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20110299055
- Publication date Dec 8, 2011
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20110273693
- Publication date Nov 10, 2011
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20110273698
- Publication date Nov 10, 2011
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20110273692
- Publication date Nov 10, 2011
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Illuminant distribution evaluation method, optical member manufactu...
- Publication number 20100002219
- Publication date Jan 7, 2010
- Nikon Corporation
- Mitsunori Toyoda
- G01 - MEASURING TESTING
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20090323041
- Publication date Dec 31, 2009
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20090147234
- Publication date Jun 11, 2009
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20090147233
- Publication date Jun 11, 2009
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20090147235
- Publication date Jun 11, 2009
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20080042068
- Publication date Feb 21, 2008
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060181690
- Publication date Aug 17, 2006
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060170891
- Publication date Aug 3, 2006
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illuminant distribution evaluation method, optical member manufactu...
- Publication number 20060166142
- Publication date Jul 27, 2006
- Nikon Corporation
- Mitsunori Toyoda
- G01 - MEASURING TESTING
Information Patent Application
Beam transforming element, illumination optical apparatus, exposure...
- Publication number 20060158624
- Publication date Jul 20, 2006
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Optical integrator, illumination optical device, exposure apparatus...
- Publication number 20060109443
- Publication date May 25, 2006
- Nikon Corporation
- Mitsunori Toyoda
- G02 - OPTICS
Information Patent Application
Illuminating optical system, exposure method
- Publication number 20050254033
- Publication date Nov 17, 2005
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical apparatus and exposure apparatus provided with...
- Publication number 20040263817
- Publication date Dec 30, 2004
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Diffractive optical device, refractive optical device, illumination...
- Publication number 20040263977
- Publication date Dec 30, 2004
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical apparatus, exposure apparatus and method of ex...
- Publication number 20040174512
- Publication date Sep 9, 2004
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical integrator, illumination optical apparatus, exposure appara...
- Publication number 20040125459
- Publication date Jul 1, 2004
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
Optical illumination device, exposure device and exposure method
- Publication number 20040036977
- Publication date Feb 26, 2004
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical apparatus, exposure apparatus and method of ex...
- Publication number 20030038931
- Publication date Feb 27, 2003
- Nikon Corporation
- Mitsunori Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical apparatus and exposure apparatus provided with...
- Publication number 20020085276
- Publication date Jul 4, 2002
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Mitsunori Toyoda

Person

Patents Grantslast 30 patents

Illumination optical apparatus, exposure apparatus, and exposure me...

Illumination optical apparatus, exposure apparatus, and exposure me...

Exposure apparatus, exposure method, and method for producing device

Illumination optical apparatus, exposure apparatus, and exposure me...

Illumination optical apparatus, exposure apparatus, and exposure me...

Illumination optical apparatus, exposure apparatus, and exposure me...

Beam transforming optical system, illumination optical apparatus, e...

Illumination optical apparatus, exposure apparatus, and exposure me...

Exposure apparatus, exposure method, and method for producing device

Illumination optical apparatus, exposure apparatus, and exposure me...

Illumination optical apparatus, exposure apparatus, and exposure me...

Beam transforming optical system, illumination optical apparatus, e...

Illumination optical apparatus, exposure apparatus, and exposure me...

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Illuminant distribution evaluation method, optical member manufactu...

Optical integrator, illumination optical device, exposure apparatus...

Illumination optical device, photolithography machine, and exposure...

Diffractive optical device, refractive optical device, illumination...

Optical illumination device, exposure device and exposure method

Optical integrator, illumination optical apparatus, exposure appara...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

BEAM TRANSFORMING OPTICAL SYSTEM, ILLUMINATION OPTICAL APPARATUS, E...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

BEAM TRANSFORMING OPTICAL SYSTEM, ILLUMINATION OPTICAL APPARATUS, E...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

BEAM TRANSFORMING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE...

Exposure Apparatus, Exposure Method, and Method for Producing Device

Beam transforming element, illumination optical apparatus, exposure...

Beam transforming element, illumination optical apparatus, exposure...

Beam transforming element, illumination optical apparatus, exposure...

Beam transforming element, illumination optical apparatus, exposure...

Illuminant distribution evaluation method, optical member manufactu...

Beam transforming element, illumination optical apparatus, exposure...

Beam transforming element, illumination optical apparatus, exposure...

Beam transforming element, illumination optical apparatus, exposure...

Beam transforming element, illumination optical apparatus, exposure...

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Illuminant distribution evaluation method, optical member manufactu...

Beam transforming element, illumination optical apparatus, exposure...

Optical integrator, illumination optical device, exposure apparatus...

Illuminating optical system, exposure method

Illumination optical apparatus and exposure apparatus provided with...

Diffractive optical device, refractive optical device, illumination...

Illumination optical apparatus, exposure apparatus and method of ex...

Optical integrator, illumination optical apparatus, exposure appara...

Optical illumination device, exposure device and exposure method

Illumination optical apparatus, exposure apparatus and method of ex...

Illumination optical apparatus and exposure apparatus provided with...