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Mitsuru Taguchi
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Process for producing semiconductor device
Patent number
RE40748
Issue date
Jun 16, 2009
Sony Corporation
Toshiaki Hasegawa
438 - Semiconductor device manufacturing: process
Information
Patent Grant
Semiconductor device having a conductive layer with a cobalt tungst...
Patent number
6,878,632
Issue date
Apr 12, 2005
Sony Corporation
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrolytic polishing apparatus, electrolytic polishing method and...
Patent number
6,736,699
Issue date
May 18, 2004
Sony Corporation
Takeshi Nogami
B24 - GRINDING POLISHING
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
6,709,979
Issue date
Mar 23, 2004
Sony Corporation
Naoki Komai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for fabricating a semiconductor device having recess portion
Patent number
6,645,852
Issue date
Nov 11, 2003
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating semiconductor devices
Patent number
6,602,787
Issue date
Aug 5, 2003
Sony Corporation
Naoki Komai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for producing semiconductor device
Patent number
6,593,246
Issue date
Jul 15, 2003
Sony Corporation
Toshiaki Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and its manufacturing method
Patent number
6,465,342
Issue date
Oct 15, 2002
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnection structure and fabrication process therefor
Patent number
6,380,065
Issue date
Apr 30, 2002
Sony Corporation
Naoki Komai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating a semiconductor device in a magnetron sputte...
Patent number
6,361,662
Issue date
Mar 26, 2002
Sony Corporation
Yasuhiro Chiba
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
6,333,258
Issue date
Dec 25, 2001
Sony Corporation
Koji Miyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
6,306,761
Issue date
Oct 23, 2001
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming wirings
Patent number
6,268,290
Issue date
Jul 31, 2001
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aluminum metallization by a barrier metal process
Patent number
6,197,686
Issue date
Mar 6, 2001
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for producing multi-layer wiring structure
Patent number
6,191,031
Issue date
Feb 20, 2001
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming wirings
Patent number
6,051,490
Issue date
Apr 18, 2000
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
5,985,747
Issue date
Nov 16, 1999
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for fabricating connection structures
Patent number
5,776,830
Issue date
Jul 7, 1998
Sony Corporation
Hirofumi Sumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multilayer interconnect structure for semiconductor device and meth...
Patent number
5,719,446
Issue date
Feb 17, 1998
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming interconnector
Patent number
5,308,793
Issue date
May 3, 1994
Sony Corporation
Mitsuru Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Electrolytic polishing apparatus, electrolytic polishing method, an...
Publication number
20040188273
Publication date
Sep 30, 2004
Takeshi Nogami
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor device and production method therefor
Publication number
20030119317
Publication date
Jun 26, 2003
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrolytic polishing apparatus, electrolytic polishing method and...
Publication number
20020090884
Publication date
Jul 11, 2002
Takeshi Nogami
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor device and manufacturing method thereof
Publication number
20020074664
Publication date
Jun 20, 2002
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for fabricating semiconductor devices
Publication number
20020068438
Publication date
Jun 6, 2002
Naoki Komai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufactuing a semiconductor device
Publication number
20020016064
Publication date
Feb 7, 2002
Naoki Komai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20010038886
Publication date
Nov 8, 2001
MITSURU TAGUCHI
H01 - BASIC ELECTRIC ELEMENTS