Mitsutoshi ASHIDA

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,842,886
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional coupler for use in a substrate processing apparatus, wh...
- Patent number 11,569,558
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Isao Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High frequency power supply device and high frequency power supply...
- Patent number 11,411,541
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Mitsuya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High frequency generator and plasma processing apparatus
- Patent number 10,818,478
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Mitsutoshi Ashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic matching unit and plasma processing apparatus
- Patent number 9,384,945
- Issue date Jul 5, 2016
- Tokyo Electron Limited
- Mitsutoshi Ashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave processing apparatus and control method thereof
- Patent number 9,337,001
- Issue date May 10, 2016
- Tokyo Electron Limited
- Mitsutoshi Ashida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Microwave irradiation apparatus
- Patent number 9,224,623
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Shigeru Kasai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Automatic matching method, computer-readable storage medium, automa...
- Patent number 9,011,636
- Issue date Apr 21, 2015
- Tokyo Electron Limited
- Mitsutoshi Ashida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave irradiation device and microwave irradiation method
- Patent number 8,907,259
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Shigeru Kasai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Plasma Measuring Method and Plasma Processing Apparatus
- Publication number 20240290589
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Mitsutoshi Ashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240274417
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Mitsutoshi ASHIDA
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
- Publication number 20240170260
- Publication date May 23, 2024
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEASUREMENT METHOD
- Publication number 20230066120
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Eiki KAMATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL COUPLER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE...
- Publication number 20210234248
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Isao TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210111003
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- B08 - CLEANING
Information Patent Application
HIGH FREQUENCY POWER SUPPLY DEVICE AND HIGH FREQUENCY POWER SUPPLY...
- Publication number 20200313628
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH FREQUENCY GENERATOR AND PLASMA PROCESSING APPARATUS
- Publication number 20180261432
- Publication date Sep 13, 2018
- Mitsutoshi ASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE HEATING APPARATUS AND MICROWAVE HEATING METHOD
- Publication number 20150305097
- Publication date Oct 22, 2015
- TOKYO ELECTRON LIMITED
- Mitsutoshi ASHIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MATCHING METHOD AND MICROWAVE HEATING METHOD
- Publication number 20150144621
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Seokhyoung HONG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE PROCESSING APPARATUS AND METHOD FOR PROCESSING OBJECT TO...
- Publication number 20130075389
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Mitsutoshi ASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PROCESSING APPARATUS AND METHOD FOR PROCESSING OBJECT TO...
- Publication number 20130075390
- Publication date Mar 28, 2013
- Mitsutoshi ASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PROCESSING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20130062341
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Mitsutoshi ASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE IRRADIATION APPARATUS
- Publication number 20120211486
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE IRRADIATION DEVICE AND MICROWAVE IRRADIATION METHOD
- Publication number 20120061384
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
AUTOMATIC MATCHING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AUTOMA...
- Publication number 20110214811
- Publication date Sep 8, 2011
- TOKYO ELECTRON LIMITED
- Mitsutoshi ASHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATIC MATCHING UNIT AND PLASMA PROCESSING APPARATUS
- Publication number 20110209827
- Publication date Sep 1, 2011
- TOKYO ELECTRON LIMITED
- Mitsutoshi ASHIDA
- H01 - BASIC ELECTRIC ELEMENTS

Mitsutoshi ASHIDA

Person

Patents Grantslast 30 patents

Plasma processing method and plasma processing apparatus

Directional coupler for use in a substrate processing apparatus, wh...

High frequency power supply device and high frequency power supply...

High frequency generator and plasma processing apparatus

Automatic matching unit and plasma processing apparatus

Microwave processing apparatus and control method thereof

Microwave irradiation apparatus

Automatic matching method, computer-readable storage medium, automa...

Microwave irradiation device and microwave irradiation method

Patents Applicationslast 30 patents

Plasma Measuring Method and Plasma Processing Apparatus

PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

PLASMA MEASUREMENT METHOD

DIRECTIONAL COUPLER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE...

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

HIGH FREQUENCY POWER SUPPLY DEVICE AND HIGH FREQUENCY POWER SUPPLY...

HIGH FREQUENCY GENERATOR AND PLASMA PROCESSING APPARATUS

MICROWAVE HEATING APPARATUS AND MICROWAVE HEATING METHOD

MATCHING METHOD AND MICROWAVE HEATING METHOD

MICROWAVE PROCESSING APPARATUS AND METHOD FOR PROCESSING OBJECT TO...

MICROWAVE PROCESSING APPARATUS AND METHOD FOR PROCESSING OBJECT TO...

MICROWAVE PROCESSING APPARATUS AND CONTROL METHOD THEREOF

MICROWAVE IRRADIATION APPARATUS

MICROWAVE IRRADIATION DEVICE AND MICROWAVE IRRADIATION METHOD

AUTOMATIC MATCHING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AUTOMA...

AUTOMATIC MATCHING UNIT AND PLASMA PROCESSING APPARATUS