Mitsuya INOUE

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Directional coupler for use in a substrate processing apparatus, wh...
- Patent number 11,569,558
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Isao Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High frequency power supply device and high frequency power supply...
- Patent number 11,411,541
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Mitsuya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Raw material gas supply method
- Patent number 9,563,209
- Issue date Feb 7, 2017
- Tokyo Electron Limited
- Mitsuya Inoue
- G05 - CONTROLLING REGULATING
Information Patent Grant
Film forming apparatus
- Patent number 9,127,358
- Issue date Sep 8, 2015
- Tokyo Electron Limited
- Mitsuya Inoue
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
DIRECTIONAL COUPLER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE...
- Publication number 20210234248
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Isao TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH FREQUENCY POWER SUPPLY DEVICE AND HIGH FREQUENCY POWER SUPPLY...
- Publication number 20200313628
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY DEVICE, FILM FORMING APPARATUS, GAS SUPPLY METHOD, AND S...
- Publication number 20150140694
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY DEVICE, FILM FORMING APPARATUS, FLOW RATE M...
- Publication number 20140209021
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY DEVICE, FILM FORMING APPARATUS, RAW MATERIA...
- Publication number 20140209022
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20120180719
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mitsuya INOUE

Person

Patents Grantslast 30 patents

Directional coupler for use in a substrate processing apparatus, wh...

High frequency power supply device and high frequency power supply...

Raw material gas supply method

Film forming apparatus

Patents Applicationslast 30 patents

DIRECTIONAL COUPLER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE...

HIGH FREQUENCY POWER SUPPLY DEVICE AND HIGH FREQUENCY POWER SUPPLY...

GAS SUPPLY DEVICE, FILM FORMING APPARATUS, GAS SUPPLY METHOD, AND S...

RAW MATERIAL GAS SUPPLY DEVICE, FILM FORMING APPARATUS, FLOW RATE M...

RAW MATERIAL GAS SUPPLY DEVICE, FILM FORMING APPARATUS, RAW MATERIA...

FILM FORMING APPARATUS