Mohamed Sabri

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 11,862,435
- Issue date Jan 2, 2024
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 11,621,150
- Issue date Apr 4, 2023
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ceramic showerhead
- Patent number 10,400,333
- Issue date Sep 3, 2019
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 10,224,182
- Issue date Mar 5, 2019
- Novellus Systems, Inc.
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ammonia radical generator
- Patent number 10,173,193
- Issue date Jan 8, 2019
- Lam Research Corporation
- Mohamed Sabri
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Systems and methods for vapor delivery in a substrate processing sy...
- Patent number 9,970,108
- Issue date May 15, 2018
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 9,873,946
- Issue date Jan 23, 2018
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing backside deposition and mitigating...
- Patent number 9,852,901
- Issue date Dec 26, 2017
- Lam Research Corporation
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for supplying vaporized precursor
- Patent number 9,637,821
- Issue date May 2, 2017
- Lam Research Corporation
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing backside deposition and mitigating...
- Patent number 9,460,915
- Issue date Oct 4, 2016
- Lam Research Corporation
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic showerhead with embedded RF electrode for capacitively coup...
- Patent number 9,449,795
- Issue date Sep 20, 2016
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid ceramic showerhead
- Patent number 9,441,296
- Issue date Sep 13, 2016
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,980,769
- Issue date Mar 17, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,629,068
- Issue date Jan 14, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor vapor generation and delivery system with filters and fil...
- Patent number 8,628,618
- Issue date Jan 14, 2014
- Novellus Systems Inc.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,454,750
- Issue date Jun 4, 2013
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Axial flux permanent magnet machines
- Patent number 7,863,784
- Issue date Jan 4, 2011
- Apex Drive Laboratories, Inc
- Edward Failing Ritz, Jr.
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20240162013
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Douglas KEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20230238220
- Publication date Jul 27, 2023
- LAM RESEARCH CORPORATION
- Douglas KEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20190172684
- Publication date Jun 6, 2019
- LAM RESEARCH CORPORATION
- Douglas KEIL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ammonia Radical Generator
- Publication number 20170050165
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- Mohamed Sabri
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
- Publication number 20160372318
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID CERAMIC SHOWERHEAD
- Publication number 20160348244
- Publication date Dec 1, 2016
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
- Publication number 20160079057
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...
- Publication number 20160056032
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR VAPOR DELIVERY
- Publication number 20160032453
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE FOR THE SEPARATION AND DEGASSING OF DISSOLVED GASES IN SEM...
- Publication number 20150380278
- Publication date Dec 31, 2015
- LAM RESEARCH CORPORATION
- Heather Landis
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20150114292
- Publication date Apr 30, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUP...
- Publication number 20140238608
- Publication date Aug 28, 2014
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SUPPLYING VAPORIZED PRECURSOR
- Publication number 20140096834
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20140080324
- Publication date Mar 20, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20130092086
- Publication date Apr 18, 2013
- Novellus Systems, Inc.
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID CERAMIC SHOWERHEAD
- Publication number 20120222815
- Publication date Sep 6, 2012
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Variable-Density Plasma Processing of Semiconductor Substrates
- Publication number 20120164834
- Publication date Jun 28, 2012
- Kevin Jennings
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-STARTING ELECTROMOTOR
- Publication number 20110285254
- Publication date Nov 24, 2011
- APEX DRIVE LABORATORIES, INC.
- John E. Bales
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...
- Publication number 20110111136
- Publication date May 12, 2011
- NOVELLUS SYSTEMS INC.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BRUSHLESS ELECTROMECHANICAL MACHINE
- Publication number 20090309463
- Publication date Dec 17, 2009
- APEX DRIVE LABORATORIES, INC.
- Edward Failing Ritz, JR.
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Mohamed Sabri

Person

Patents Grantslast 30 patents

Mechanical suppression of parasitic plasma in substrate processing...

Mechanical suppression of parasitic plasma in substrate processing...

Hybrid ceramic showerhead

Mechanical suppression of parasitic plasma in substrate processing...

Ammonia radical generator

Systems and methods for vapor delivery in a substrate processing sy...

Multi-station sequential curing of dielectric films

Systems and methods for reducing backside deposition and mitigating...

Method for supplying vaporized precursor

Systems and methods for reducing backside deposition and mitigating...

Ceramic showerhead with embedded RF electrode for capacitively coup...

Hybrid ceramic showerhead

Multi-station sequential curing of dielectric films

Multi-station sequential curing of dielectric films

Precursor vapor generation and delivery system with filters and fil...

Multi-station sequential curing of dielectric films

Axial flux permanent magnet machines

Patents Applicationslast 30 patents

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

Ammonia Radical Generator

SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...

HYBRID CERAMIC SHOWERHEAD

SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...

METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...

SYSTEMS AND METHODS FOR VAPOR DELIVERY

HARDWARE FOR THE SEPARATION AND DEGASSING OF DISSOLVED GASES IN SEM...

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUP...

METHOD FOR SUPPLYING VAPORIZED PRECURSOR

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

HYBRID CERAMIC SHOWERHEAD

Variable-Density Plasma Processing of Semiconductor Substrates

SELF-STARTING ELECTROMOTOR

PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...

BRUSHLESS ELECTROMECHANICAL MACHINE