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Mohammad Mehdi Daneshpanah
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Foster City, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for switching between an EUV pellicle and an opti...
Patent number
11,156,927
Issue date
Oct 26, 2021
KLA Corporation
Mohammad Mehdi Daneshpanah
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for inspecting reticles
Patent number
10,395,361
Issue date
Aug 27, 2019
KLA-Tencor Corporation
Abdurrahman Sezginer
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring positions of structures on a mask and thereby...
Patent number
9,424,636
Issue date
Aug 23, 2016
KLA-Tencor Corporation
Frank Laske
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Model-based registration and critical dimension metrology
Patent number
9,311,700
Issue date
Apr 12, 2016
KLA-Tencor Corporation
Mohammad Mehdi Daneshpanah
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHODS FOR INSPECTING RETICLES
Publication number
20180082415
Publication date
Mar 22, 2018
KLA-Tencor Corporation
Abdurrahman Sezginer
G01 - MEASURING TESTING
Information
Patent Application
METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR GENERATING HIGH DEN...
Publication number
20150310160
Publication date
Oct 29, 2015
KLA-Tencor Corporation
Frank LASKE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MEASURING POSITIONS OF STRUCTURES ON A MASK AND THEREBY...
Publication number
20150248756
Publication date
Sep 3, 2015
KLA-Tencor Corporation
Frank LASKE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR DETERMINING THE POSITION OF DEFECTS ON OBJECT...
Publication number
20150226539
Publication date
Aug 13, 2015
KLA-Tencor Corporation
Klaus-Dieter ROETH
G01 - MEASURING TESTING
Information
Patent Application
Model-Based Registration and Critical Dimension Metrology
Publication number
20140086475
Publication date
Mar 27, 2014
KLA-Tencor Corporation
Mohammad Mehdi Daneshpanah
G06 - COMPUTING CALCULATING COUNTING