Mohan K. Bhan

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming contact structures using nitrogen trifluoride pre...
- Patent number 6,573,181
- Issue date Jun 3, 2003
- Applied Materials, Inc.
- Ramanujapuram A. Srinivas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition of copper using profiled distribution of...
- Patent number 6,410,089
- Issue date Jun 25, 2002
- Applied Materials, Inc.
- Xin Sheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for treating a deposited film for resistivity reduction
- Patent number 6,319,728
- Issue date Nov 20, 2001
- Applied Materials, Inc.
- Mohan K. Bhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition hardware and process
- Patent number 6,296,712
- Issue date Oct 2, 2001
- Applied Materials, Inc.
- Xin Sheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improving the film quality of plasma enhan...
- Patent number 6,291,028
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Anand Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improving the film quality of plasma enhan...
- Patent number 6,289,843
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Anand Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film to tie up loose fluorine in the chamber after a clean process
- Patent number 6,223,685
- Issue date May 1, 2001
- Applied Materials, Inc.
- Anand Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improving the film quality of plasma enhan...
- Patent number 6,121,163
- Issue date Sep 19, 2000
- Applied Materials, Inc.
- Anand Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improving film stability of halogen-doped...
- Patent number 6,090,167
- Issue date Jul 18, 2000
- Applied Materials, Inc.
- Mohan Krishan Bhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern of apertures in a showerhead for chemical vapor deposition
- Patent number 6,050,506
- Issue date Apr 18, 2000
- Applied Materials, Inc.
- Xin Sheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film to tie up loose fluorine in the chamber after a clean process
- Patent number 6,020,035
- Issue date Feb 1, 2000
- Applied Materials, Inc.
- Anand Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improving film stability of halogen-doped...
- Patent number 6,001,728
- Issue date Dec 14, 1999
- Applied Materials, Inc.
- Mohan Krishan Bhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving film stability of fluorosilicate glass films
- Patent number 5,827,785
- Issue date Oct 27, 1998
- Applied Materials, Inc.
- Mohan Krishan Bhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for improving chemical vapor deposition of titanium
- Publication number 20020094387
- Publication date Jul 18, 2002
- Mohan Krishnan Bhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mohan K. Bhan

Person

Patents Grantslast 30 patents

Method of forming contact structures using nitrogen trifluoride pre...

Chemical vapor deposition of copper using profiled distribution of...

Method for treating a deposited film for resistivity reduction

Chemical vapor deposition hardware and process

Method and apparatus for improving the film quality of plasma enhan...

Method and apparatus for improving the film quality of plasma enhan...

Film to tie up loose fluorine in the chamber after a clean process

Method and apparatus for improving the film quality of plasma enhan...

Method and apparatus for improving film stability of halogen-doped...

Pattern of apertures in a showerhead for chemical vapor deposition

Film to tie up loose fluorine in the chamber after a clean process

Method and apparatus for improving film stability of halogen-doped...

Method for improving film stability of fluorosilicate glass films

Patents Applicationslast 30 patents

Method for improving chemical vapor deposition of titanium