Mohsen Salek

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-station tool with wafer transfer microclimate systems
- Patent number 10,515,834
- Issue date Dec 24, 2019
- Lam Research Corporation
- Mohsen Salek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for wafer level singulation
- Patent number 9,502,294
- Issue date Nov 22, 2016
- Applied Materials, Inc.
- Klaus Schuegraf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for wafer level singulation
- Patent number 8,580,615
- Issue date Nov 12, 2013
- Applied Materials, Inc.
- Klaus Schuegraf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,550,031
- Issue date Oct 8, 2013
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,215,262
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,181,596
- Issue date May 22, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,146,530
- Issue date Apr 3, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,925,377
- Issue date Apr 12, 2011
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cartesian cluster tool configuration for lithography type processes
- Patent number 7,819,079
- Issue date Oct 26, 2010
- Applied Materials, Inc.
- Eric A. Englhardt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,743,728
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,694,647
- Issue date Apr 13, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,357,842
- Issue date Apr 15, 2008
- Sokudo Co., Ltd.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Profile control platen
- Patent number 7,115,024
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Profile control platen
- Patent number 6,913,518
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Robot blade for semiconductor processing equipment
- Patent number 6,709,218
- Issue date Mar 23, 2004
- Applied Materials, Inc.
- Frederik W. Freerks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retainers and non-abrasive liners used in chemical mechanical polis...
- Patent number 6,390,904
- Issue date May 21, 2002
- Applied Materials, Inc.
- Allan Gleason
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for cleaning edges of contaminated substrates
- Patent number 6,334,229
- Issue date Jan 1, 2002
- Lam Research Corporation
- Mansour Moinpour
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning edges of contaminated substrates
- Patent number 5,861,066
- Issue date Jan 19, 1999
- Ontrak Systems, Inc.
- Mansour Moinpour
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING H...
- Publication number 20170125272
- Publication date May 4, 2017
- LAM RESEARCH CORPORATION
- James Stephen van Gogh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR SYSTEM LAYOUT UTILIZING THREE-DIMENSIONS
- Publication number 20170092516
- Publication date Mar 30, 2017
- LAM RESEARCH CORPORATION
- James Stephen van Gogh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-HARDNESS-MATERIAL-POWDER INFUSED ELASTOMER FOR HIGH FRICTION A...
- Publication number 20170040205
- Publication date Feb 9, 2017
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD AND SYSTEM FOR WAFER LEVEL SINGULATION
- Publication number 20140196850
- Publication date Jul 17, 2014
- Applied Materials, Inc.
- Klaus Schuegraf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR WAFER LEVEL SINGULATION
- Publication number 20130045570
- Publication date Feb 21, 2013
- Applied Materials, Inc.
- Klaus Schuegraf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120320361
- Publication date Dec 20, 2012
- Tetsuya Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120180983
- Publication date Jul 19, 2012
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING WAFER CENTERING ON A TRACK LITHO...
- Publication number 20090110532
- Publication date Apr 30, 2009
- SOKUDO CO., LTD.
- Mohsen S. Salek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090067956
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090064928
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090064929
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR HMDS TREATMENT OF SUBSTRATE EDGES
- Publication number 20090023297
- Publication date Jan 22, 2009
- SOKUDO CO., LTD.
- Mohsen Salek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20080223293
- Publication date Sep 18, 2008
- Sokudo Co,. Ltd.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20080199282
- Publication date Aug 21, 2008
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND SYSTEMS FOR PERFORMING IMMERSION PROCESSING DURING LITH...
- Publication number 20080050679
- Publication date Feb 28, 2008
- SOKUDO CO., LTD.
- Mohsen S. Salek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CARTESIAN CLUSTER TOOL CONFIGURATION FOR LITHOGRAPHY TYPE PROCESSES
- Publication number 20070144439
- Publication date Jun 28, 2007
- APPLIED MATERIALS, INC.
- Eric A. Englhardt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20060286300
- Publication date Dec 21, 2006
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20060278165
- Publication date Dec 14, 2006
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
Cluster tool architecture for processing a substrate
- Publication number 20060130750
- Publication date Jun 22, 2006
- APPLIED MATERIALS, INC.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
Cluster tool architecture for processing a substrate
- Publication number 20060134330
- Publication date Jun 22, 2006
- APPLIED MATERIALS, INC.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
Profile control platen
- Publication number 20050186892
- Publication date Aug 25, 2005
- Applied Materials, Inc. a Delaware Corporation
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Profile control platen
- Publication number 20040224615
- Publication date Nov 11, 2004
- APPLIED MATERIALS, INC.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
N2 splash guard for liquid injection on the rotating substrate
- Publication number 20030070695
- Publication date Apr 17, 2003
- APPLIED MATERIALS, INC.
- Ramin Emami
- B08 - CLEANING

Mohsen Salek

Person

Patents Grantslast 30 patents

Multi-station tool with wafer transfer microclimate systems

Method and system for wafer level singulation

Method and system for wafer level singulation

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cartesian cluster tool configuration for lithography type processes

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Profile control platen

Profile control platen

Robot blade for semiconductor processing equipment

Retainers and non-abrasive liners used in chemical mechanical polis...

Apparatus for cleaning edges of contaminated substrates

Method and apparatus for cleaning edges of contaminated substrates

Patents Applicationslast 30 patents

WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING H...

MODULAR SYSTEM LAYOUT UTILIZING THREE-DIMENSIONS

HIGH-HARDNESS-MATERIAL-POWDER INFUSED ELASTOMER FOR HIGH FRICTION A...

METHOD AND SYSTEM FOR WAFER LEVEL SINGULATION

METHOD AND SYSTEM FOR WAFER LEVEL SINGULATION

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

METHOD AND APPARATUS FOR PROVIDING WAFER CENTERING ON A TRACK LITHO...

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

METHOD AND APPARATUS FOR HMDS TREATMENT OF SUBSTRATE EDGES

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

METHODS AND SYSTEMS FOR PERFORMING IMMERSION PROCESSING DURING LITH...

CARTESIAN CLUSTER TOOL CONFIGURATION FOR LITHOGRAPHY TYPE PROCESSES

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Profile control platen

Profile control platen

N2 splash guard for liquid injection on the rotating substrate