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Morie Suzuki
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Fukushima, JP
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last 30 patents
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Patent Grant
Method of cleaning silicon wafers in cleaning baths with controlled...
Patent number
5,662,743
Issue date
Sep 2, 1997
Shin-Etsu Handotai Co., Ltd.
Masami Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of inspecting particles on wafers
Patent number
5,640,238
Issue date
Jun 17, 1997
Shin-Etsu Handotai Co., Ltd.
Masami Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Brush cleaning apparatus and cleaning system for disk-shaped object...
Patent number
5,581,837
Issue date
Dec 10, 1996
Shin-Etsu Handotai Co., Ltd.
Isao Uchiyama
B08 - CLEANING
Information
Patent Grant
Method for handling or processing semiconductor wafers
Patent number
5,547,515
Issue date
Aug 20, 1996
Shin-Etsu Handotai Co., Ltd.
Hideo Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic cleaning apparatus for wafers
Patent number
5,317,778
Issue date
Jun 7, 1994
Shin-Etsu Handotai Co., Ltd.
Hideo Kudo
H01 - BASIC ELECTRIC ELEMENTS