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Motosuke Miyoshi
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Fujisawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate inspection apparatus, substrate inspection method and met...
Patent number
7,847,250
Issue date
Dec 7, 2010
Kabushiki Kaisha Toshiba
Ichirota Nagahama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray source
Patent number
7,649,980
Issue date
Jan 19, 2010
The University of Tokyo
Nobutada Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate inspection apparatus, substrate inspection method and met...
Patent number
7,462,829
Issue date
Dec 9, 2008
Kabushiki Kaisha Toshiba
Ichirota Nagahama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate inspection apparatus, substrate inspection method and met...
Patent number
7,211,796
Issue date
May 1, 2007
Kabushiki Kaisha Toshiba
Ichirota Nagahama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electronic optical lens barrel and production method therefor
Patent number
7,193,221
Issue date
Mar 20, 2007
Toudai TLO, Ltd.
Katsuya Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photomask repair method and apparatus
Patent number
6,991,878
Issue date
Jan 31, 2006
Kabushiki Kaisha Toshiba
Shingo Kanamitsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure system
Patent number
6,815,698
Issue date
Nov 9, 2004
Kabushiki Kaisha Toshiba
Osamu Nagano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate inspection system and method for controlling same
Patent number
6,768,112
Issue date
Jul 27, 2004
Kabushiki Kaisha Toshiba
Yuichiro Yamazaki
G01 - MEASURING TESTING
Information
Patent Grant
Substrate inspecting system using electron beam and substrate inspe...
Patent number
6,563,114
Issue date
May 13, 2003
Kabushiki Kaisha Toshiba
Ichirota Nagahama
G01 - MEASURING TESTING
Information
Patent Grant
Eddy current loss measuring sensor, thickness measuring system, thi...
Patent number
6,563,308
Issue date
May 13, 2003
Kabushiki Kaisha Toshiba
Osamu Nagano
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam lithography system and pattern writing method
Patent number
6,525,328
Issue date
Feb 25, 2003
Kabushiki Kaisha Toshiba
Motosuke Miyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern dimension measuring system and pattern dimension measuring...
Patent number
6,515,296
Issue date
Feb 4, 2003
Kabushiki Kaisha Toshiba
Fumio Komatsu
G01 - MEASURING TESTING
Information
Patent Grant
Charged beam drawing apparatus
Patent number
6,495,841
Issue date
Dec 17, 2002
Kabushiki Kaisha Toshiba
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and method of controlling charged p...
Patent number
6,414,323
Issue date
Jul 2, 2002
Kabushiki Kaisha Toshiba
Hideaki Abe
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor polishing apparatus and method for chemical/mechanica...
Patent number
6,410,439
Issue date
Jun 25, 2002
Kabushiki Kaisha Toshiba
Masako Kodera
B24 - GRINDING POLISHING
Information
Patent Grant
Inspection method and apparatus using electron beam
Patent number
6,265,719
Issue date
Jul 24, 2001
Kabushiki Kaisha Toshiba
Yuichiro Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam inspection method and apparatus
Patent number
6,259,094
Issue date
Jul 10, 2001
Kabushiki Kaisha Toshiba
Takamitsu Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic method utilizing charged particle beam exposure and fl...
Patent number
6,171,760
Issue date
Jan 9, 2001
Kabushiki Kaisha Toshiba
Yuichiro Yamazaki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Substrate inspecting apparatus, substrate inspecting system having...
Patent number
6,038,018
Issue date
Mar 14, 2000
Kabushiki Kaisha Toshiba
Yuichiro Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam irradiating apparatus and electric signal detecting a...
Patent number
5,818,217
Issue date
Oct 6, 1998
Kabushiki Kaisha Toshiba
Fumio Komatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma apparatus
Patent number
5,639,308
Issue date
Jun 17, 1997
Kabushiki Kaisha Toshiba
Yuichiro Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focused ion beam deposition using TMCTS
Patent number
5,639,699
Issue date
Jun 17, 1997
Kabushiki Kaisha Toshiba
Hiroko Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer pattern defect detection method and apparatus therefor
Patent number
5,576,833
Issue date
Nov 19, 1996
Kabushiki Kaisha Toshiba
Motosuke Miyoshi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for repairing defect on plane surface of phase...
Patent number
5,569,392
Issue date
Oct 29, 1996
Kabushiki Kaisha Toshiba
Motosuke Miyoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Magnetic field immersion type electron gun
Patent number
5,548,183
Issue date
Aug 20, 1996
Kabushiki Kaisha Toshiba
Motosuke Miyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing an electrostatic lens
Patent number
5,535,508
Issue date
Jul 16, 1996
Kabushiki Kaisha Toshiba
Takamitsu Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defect detecting apparatus and method
Patent number
5,498,874
Issue date
Mar 12, 1996
Kabushiki Kaisha Toshiba
Motosuke Miyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle detection device and charged particle radiation ap...
Patent number
5,491,339
Issue date
Feb 13, 1996
Kabushiki Kaisha Toshiba
Tadashi Mitsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic lens and method for producing the same
Patent number
5,444,256
Issue date
Aug 22, 1995
Kabushiki Kaisha Toshiba
Takamitsu Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of repairing defect of structure
Patent number
5,429,730
Issue date
Jul 4, 1995
Kabushiki Kaisha Toshiba
Hiroko Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Substrate inspection apparatus, substrate inspection method and met...
Publication number
20090072139
Publication date
Mar 19, 2009
Kabushiki Kaisha Toshiba
Ichirota Nagahama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
X-RAY SOURCE
Publication number
20080304624
Publication date
Dec 11, 2008
THE UNIVERSITY OF TOKYO
Nobutada Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate inspection apparatus, substrate inspection method and met...
Publication number
20070187600
Publication date
Aug 16, 2007
Kabushiki Kaisha Toshiba
Ichirota Nagahama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electronic optical lens barrel and production method therefor
Publication number
20050173649
Publication date
Aug 11, 2005
Katsuya Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate inspection apparatus, substrate inspection method and met...
Publication number
20050029451
Publication date
Feb 10, 2005
Ichirota Nagahama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Photomask repair method and apparatus
Publication number
20030215722
Publication date
Nov 20, 2003
Shingo Kanamitsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EDDY CURRENT LOSS MEASURING SENSOR, THICKNESS MEASURING SYSTEM, THI...
Publication number
20030067298
Publication date
Apr 10, 2003
Kabushiki Kaisha Toshiba
Osamu Nagano
G01 - MEASURING TESTING
Information
Patent Application
Substrate inspection system and method for controlling same
Publication number
20020084411
Publication date
Jul 4, 2002
Yuichiro Yamazaki
G01 - MEASURING TESTING
Information
Patent Application
Charged particle beam exposure system
Publication number
20020033458
Publication date
Mar 21, 2002
Osamu Nagano
B82 - NANO-TECHNOLOGY