Mukul Khosla

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for rapid pump-down of a high-vacuum loadlock
- Patent number 10,115,608
- Issue date Oct 30, 2018
- Novellus Systems, Inc.
- Edmund B. Minshall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for inhibiting oxide growth in substrate handle...
- Patent number 9,275,884
- Issue date Mar 1, 2016
- Novellus Systems, Inc.
- Mukul Khosla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Closed loop monitoring of electroplating bath constituents using ma...
- Patent number 6,726,824
- Issue date Apr 27, 2004
- Novellus Systems, Inc.
- Mukul Khosla
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Capillary tube assembly with replaceable capillary tube
- Patent number 6,667,474
- Issue date Dec 23, 2003
- Thermo Finnigan LLC.
- Jeffrey B. Abramson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivation of copper in dual damascene metalization
- Patent number 6,554,914
- Issue date Apr 29, 2003
- Novellus Systems, Inc.
- Robert T. Rozbicki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for enhanced degassing of semiconductor wafers...
- Patent number 6,497,734
- Issue date Dec 24, 2002
- Novellus Systems, Inc.
- Kenneth K. Barber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear multipole rod assembly for mass spectrometers
- Patent number 6,441,370
- Issue date Aug 27, 2002
- Thermo Finnigan LLC.
- Mukul Khosla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleansing vias in semiconductor wafer having metal conduc...
- Patent number 6,319,842
- Issue date Nov 20, 2001
- Novellus Systems Incorporated
- Mukul Khosla
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER PROCESSES FOR REDUCING BACKSIDE PARTICLES
- Publication number 20220364227
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Yi Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR RAPID PUMP-DOWN OF A HIGH-VACUUM LOADLOCK
- Publication number 20130312835
- Publication date Nov 28, 2013
- Edmund B. Minshall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vapor Delivery Apparatus
- Publication number 20130312663
- Publication date Nov 28, 2013
- APPLIED MICROSTRUCTURES, INC.
- Mukul Khosla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR INHIBITING OXIDE GROWTH IN SUBSTRATE HANDLE...
- Publication number 20120251271
- Publication date Oct 4, 2012
- Novellus Systems, Inc.
- Mukul Khosla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mukul Khosla

Person

Patents Grantslast 30 patents

Method and apparatus for rapid pump-down of a high-vacuum loadlock

Systems and methods for inhibiting oxide growth in substrate handle...

Closed loop monitoring of electroplating bath constituents using ma...

Capillary tube assembly with replaceable capillary tube

Passivation of copper in dual damascene metalization

Apparatus and method for enhanced degassing of semiconductor wafers...

Linear multipole rod assembly for mass spectrometers

Method of cleansing vias in semiconductor wafer having metal conduc...

Patents Applicationslast 30 patents

CHAMBER PROCESSES FOR REDUCING BACKSIDE PARTICLES

METHOD AND APPARATUS FOR RAPID PUMP-DOWN OF A HIGH-VACUUM LOADLOCK

Vapor Delivery Apparatus

SYSTEMS AND METHODS FOR INHIBITING OXIDE GROWTH IN SUBSTRATE HANDLE...