Munehiro Shibuya

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Patents Grantslast 30 patents

Information Patent Grant
Silicon structure, method for producing the same, and solar battery...
- Patent number 6,518,494
- Issue date Feb 11, 2003
- Matsushita Electric Industrial Co., Ltd.
- Munehiro Shibuya
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for forming silicon film and silicon film forming apparatus
- Patent number 5,766,342
- Issue date Jun 16, 1998
- Matsushita Electric Industrial Co., Ltd.
- Munehiro Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric thin film and method of manufacturing same
- Patent number 5,470,398
- Issue date Nov 28, 1995
- Matsushita Electric Industrial Co., Ltd.
- Munehiro Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low vapor-pressure material feeding apparatus
- Patent number 5,431,733
- Issue date Jul 11, 1995
- Matsushita Electric Industrial Co., Ltd.
- Munehiro Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for producing a thin film of tantalum oxide
- Patent number 5,203,925
- Issue date Apr 20, 1993
- Matsushita Electric Industrial Co., Ltd.
- Munehiro Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Silicon structure, method for producing the same, and solar battery...
- Publication number 20030106581
- Publication date Jun 12, 2003
- Matsushita Electric Industrial Co., Ltd.
- Munehiro Shibuya
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF PRODUCING THIN SEMICONDUCTOR FILM AND APPARATUS THEREFOR
- Publication number 20020005159
- Publication date Jan 17, 2002
- MASATOSHI KITAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...