Munetaka Yamagami

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Minato-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma treatment device and optical monitor device
- Patent number 8,974,628
- Issue date Mar 10, 2015
- Tokyo Electron Limited
- Toshihisa Nozawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESS MONITORING DEVICE FOR USE IN SUBSTRATE PROCESS APPARATUS, P...
- Publication number 20140166205
- Publication date Jun 19, 2014
- TOKYO ELECTRON LIMITED
- Caizhong Tian
- G01 - MEASURING TESTING
Information Patent Application
PLASMA TREATMENT DEVICE AND OPTICAL MONITOR DEVICE
- Publication number 20130180660
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Toshihisa Nozawa
- G01 - MEASURING TESTING
Information Patent Application
INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND P...
- Publication number 20110046765
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Munetaka Yamagami
- G05 - CONTROLLING REGULATING
Information Patent Application
HOST CONTROL DEVICE, SLAVE CONTROL DEVICE, SCREEN OPERATION RIGHT G...
- Publication number 20100045684
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Munetaka Yamagami
- G06 - COMPUTING CALCULATING COUNTING