Mutsumi Tanikawa

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for conditioning a polishing pad
- Patent number 9,533,395
- Issue date Jan 3, 2017
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad
- Patent number 9,469,013
- Issue date Oct 18, 2016
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method of adjusting profile of a polishing member used in a polishi...
- Patent number 9,156,130
- Issue date Oct 13, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Method of obtaining a sliding distance distribution of a dresser on...
- Patent number 9,108,292
- Issue date Aug 18, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Pure water reusing system
- Patent number 6,508,695
- Issue date Jan 21, 2003
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing liquid supply apparatus
- Patent number 6,358,125
- Issue date Mar 19, 2002
- Ebara Corporation
- Kiyotaka Kawashima
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for supplying polishing liquid
- Patent number 6,338,671
- Issue date Jan 15, 2002
- Ebara Corporation
- Kiyotaka Kawashima
- B24 - GRINDING POLISHING
Information Patent Grant
Filter apparatus
- Patent number 6,280,300
- Issue date Aug 28, 2001
- Ebara Corporation
- Mitsunori Komatsu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
- Publication number 20160158911
- Publication date Jun 9, 2016
- EBARA CORPORATION
- Mutsumi TANIKAWA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...
- Publication number 20140342642
- Publication date Nov 20, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...
- Publication number 20140287653
- Publication date Sep 25, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
- Publication number 20120315829
- Publication date Dec 13, 2012
- Mutsumi TANIKAWA
- B24 - GRINDING POLISHING
Information Patent Application
Pure water reusing system
- Publication number 20010034190
- Publication date Oct 25, 2001
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing liquid supply apparatus
- Publication number 20010002361
- Publication date May 31, 2001
- Kiyotaka Kawashima
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Mutsumi Tanikawa

Person

Patents Grantslast 30 patents

Method and apparatus for conditioning a polishing pad

Method and apparatus for conditioning a polishing pad

Method of adjusting profile of a polishing member used in a polishi...

Method of obtaining a sliding distance distribution of a dresser on...

Pure water reusing system

Polishing liquid supply apparatus

Apparatus for supplying polishing liquid

Filter apparatus

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD

METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...

METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...

METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD

Pure water reusing system

Polishing liquid supply apparatus