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Mutsumi Tanikawa
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Yokohama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for conditioning a polishing pad
Patent number
9,533,395
Issue date
Jan 3, 2017
Ebara Corporation
Mutsumi Tanikawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for conditioning a polishing pad
Patent number
9,469,013
Issue date
Oct 18, 2016
Ebara Corporation
Mutsumi Tanikawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method of adjusting profile of a polishing member used in a polishi...
Patent number
9,156,130
Issue date
Oct 13, 2015
Ebara Corporation
Takahiro Shimano
B24 - GRINDING POLISHING
Information
Patent Grant
Method of obtaining a sliding distance distribution of a dresser on...
Patent number
9,108,292
Issue date
Aug 18, 2015
Ebara Corporation
Takahiro Shimano
B24 - GRINDING POLISHING
Information
Patent Grant
Pure water reusing system
Patent number
6,508,695
Issue date
Jan 21, 2003
Ebara Corporation
Mutsumi Tanikawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing liquid supply apparatus
Patent number
6,358,125
Issue date
Mar 19, 2002
Ebara Corporation
Kiyotaka Kawashima
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for supplying polishing liquid
Patent number
6,338,671
Issue date
Jan 15, 2002
Ebara Corporation
Kiyotaka Kawashima
B24 - GRINDING POLISHING
Information
Patent Grant
Filter apparatus
Patent number
6,280,300
Issue date
Aug 28, 2001
Ebara Corporation
Mitsunori Komatsu
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
Publication number
20160158911
Publication date
Jun 9, 2016
EBARA CORPORATION
Mutsumi TANIKAWA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...
Publication number
20140342642
Publication date
Nov 20, 2014
Takahiro SHIMANO
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...
Publication number
20140287653
Publication date
Sep 25, 2014
Takahiro SHIMANO
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
Publication number
20120315829
Publication date
Dec 13, 2012
Mutsumi TANIKAWA
B24 - GRINDING POLISHING
Information
Patent Application
Pure water reusing system
Publication number
20010034190
Publication date
Oct 25, 2001
Mutsumi Tanikawa
B24 - GRINDING POLISHING
Information
Patent Application
Polishing liquid supply apparatus
Publication number
20010002361
Publication date
May 31, 2001
Kiyotaka Kawashima
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL