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Substrate processing apparatus
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Patent number 11,967,513
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Issue date Apr 23, 2024
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Kokusai Electric Corporation
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Teruo Yoshino
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
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Patent number 11,891,697
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Issue date Feb 6, 2024
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Kokusai Electric Corporation
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Naofumi Ohashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of manufacturing semiconductor device
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Patent number 11,728,183
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Issue date Aug 15, 2023
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Kokusai Electric Corporation
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Hideharu Itatani
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,538,661
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Issue date Dec 27, 2022
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Kokusai Electric Corporation
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Teruo Yoshino
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
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Patent number 11,473,196
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Issue date Oct 18, 2022
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Kokusai Electric Corporation
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Naofumi Ohashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,380,540
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Issue date Jul 5, 2022
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Kokusai Electric Corporation
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Takashi Nakagawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,104,995
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Issue date Aug 31, 2021
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Kokusai Electric Corporation
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Takashi Yahata
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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