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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Beam irradiation device
Patent number
11,239,042
Issue date
Feb 1, 2022
HITACHI HIGH-TECH CORPORATION
Akira Ikegami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam irradiation device
Patent number
10,832,886
Issue date
Nov 10, 2020
HITACHI HIGH-TECH CORPORATION
Akira Ikegami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
9,177,757
Issue date
Nov 3, 2015
Hitachi High-Technologies Corporation
Naoma Ban
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface observation apparatus and surface observation method
Patent number
9,136,189
Issue date
Sep 15, 2015
Hitachi High-Technologies Corporation
Takehiro Hirai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Observation method and observation device
Patent number
8,878,925
Issue date
Nov 4, 2014
Hitachi High-Technologies Corporation
Naoma Ban
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope and sample observation method
Patent number
8,519,334
Issue date
Aug 27, 2013
Hitachi High-Technologies Corporation
Satoshi Tadaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and displacement detecting circuit
Patent number
8,125,647
Issue date
Feb 28, 2012
Hitachi High-Technologies Corporation
Hiroshi Tsuji
G01 - MEASURING TESTING
Information
Patent Grant
Review method and review device
Patent number
8,013,299
Issue date
Sep 6, 2011
Hitachi High-Technologies Corporation
Kenji Obara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Beam Irradiation Device
Publication number
20210027976
Publication date
Jan 28, 2021
HITACHI HIGH-TECH CORPORATION
Akira IKEGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged-Particle Beam Device
Publication number
20190393014
Publication date
Dec 26, 2019
Hitachi High-Technologies Corporation
Yuta KAWAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Beam Irradiation Device
Publication number
20190287754
Publication date
Sep 19, 2019
Hitachi High-Technologies Corporation
Akira IKEGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20150170875
Publication date
Jun 18, 2015
Hitachi High-Technologies Corporation
Naoma Ban
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
Publication number
20130037716
Publication date
Feb 14, 2013
Hitachi High-Technologies Corporation
Satoshi Tadaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBSERVATION METHOD AND OBSERVATION DEVICE
Publication number
20120300056
Publication date
Nov 29, 2012
Hitachi High-Technologies Corporation
Naoma Ban
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE OBSERVATION APPARATUS AND SURFACE OBSERVATION METHOD
Publication number
20120044262
Publication date
Feb 23, 2012
Takehiro Hirai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND DISPLACEMENT DETECTING CIRCUIT
Publication number
20090225326
Publication date
Sep 10, 2009
Hitachi High-Technologies Corporation
Hiroshi Tsuji
G01 - MEASURING TESTING
Information
Patent Application
REVIEW METHOD AND REVIEW DEVICE
Publication number
20090206259
Publication date
Aug 20, 2009
Hitachi High-Technologies Corporation
Kenji Obara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Report Search Method, Report Search System, and Reviewing Apparatus
Publication number
20080263028
Publication date
Oct 23, 2008
Hitachi High-Technologies Corporation
Takehiro Hirai
G06 - COMPUTING CALCULATING COUNTING