Naoto Hayasaka

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 12,159,771
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Yuki Kawada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220399191
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Yuki KAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, PLASMA PROCESSING SYSTEM, AND PLASMA ETCHING METHOD
- Publication number 20220270862
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Naoto HAYASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Holding method, analog to digital converting method, signal observi...
- Publication number 20050206545
- Publication date Sep 22, 2005
- AGILENT TECHNOLOGIES, INC.
- Haruo Kobayashi
- H03 - BASIC ELECTRONIC CIRCUITRY