Naoya Kida

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate supporting apparatus
- Patent number RE43837
- Issue date Dec 4, 2012
- NHK Spring Co., Ltd.
- Naoya Kida
- 118 - Coating apparatus
Information Patent Grant
Substrate supporting apparatus
- Patent number 7,503,980
- Issue date Mar 17, 2009
- NHK Spring Co., Ltd.
- Naoya Kida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LAMINATE STRUCTURE, STAGE, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
- Publication number 20240347371
- Publication date Oct 17, 2024
- NHK Spring Co., Ltd.
- Yusuke OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACEMENT BOARD AND PLACEMENT STRUCTURE
- Publication number 20240178049
- Publication date May 30, 2024
- NHK Spring Co., Ltd.
- Naoya Kida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHEATHED HEATER AND SUBSTRATE SUPPORT DEVICE INCLUDING THE SAME
- Publication number 20240032156
- Publication date Jan 25, 2024
- NHK Spring Co., Ltd.
- Naoya KIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
STAGE AND MANUFACTURING METHOD THEREOF
- Publication number 20230207286
- Publication date Jun 29, 2023
- NHK Spring Co., Ltd.
- Hibiki YOKOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE, FILM-FORMING APPARATUS OR FILM-PROCESSING APPARATUS INCLUDIN...
- Publication number 20220157579
- Publication date May 19, 2022
- NHK Spring Co., Ltd.
- Naoya Kida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE SENSOR AND HEATER UNIT
- Publication number 20220155156
- Publication date May 19, 2022
- NHK Spring Co., Ltd.
- Naoya KIDA
- G05 - CONTROLLING REGULATING
Information Patent Application
HEATER
- Publication number 20220151031
- Publication date May 12, 2022
- NHK Spring Co., Ltd.
- Naoya KIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate supporting apparatus and manufacturing method therefor
- Publication number 20070157466
- Publication date Jul 12, 2007
- NHK Spring Co., Ltd.
- Naoya Kida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Substrate supporting apparatus

Substrate supporting apparatus

Patents Applicationslast 30 patents

LAMINATE STRUCTURE, STAGE, SEMICONDUCTOR MANUFACTURING DEVICE, AND...

PLACEMENT BOARD AND PLACEMENT STRUCTURE

SHEATHED HEATER AND SUBSTRATE SUPPORT DEVICE INCLUDING THE SAME

STAGE AND MANUFACTURING METHOD THEREOF

STAGE, FILM-FORMING APPARATUS OR FILM-PROCESSING APPARATUS INCLUDIN...

TEMPERATURE SENSOR AND HEATER UNIT

HEATER

Substrate supporting apparatus and manufacturing method therefor