Naoyuki Wada

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition method and vapor deposition device
- Patent number 12,142,482
- Issue date Nov 12, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition method and vapor deposition device
- Patent number 12,100,590
- Issue date Sep 24, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition device
- Patent number 11,898,246
- Issue date Feb 13, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial wafer production system for performing a correction based...
- Patent number 11,873,577
- Issue date Jan 16, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing epitaxial wafer
- Patent number 11,414,780
- Issue date Aug 16, 2022
- Sumco Corporation
- Yu Minamide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor and epitaxial growth device
- Patent number 11,274,371
- Issue date Mar 15, 2022
- Sumco Corporation
- Shoji Nogami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of inspecting back surface of epitaxial wafer, epitaxial waf...
- Patent number 10,718,722
- Issue date Jul 21, 2020
- Sumco Corporation
- Keiko Matsuo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for manufacturing epitaxial wafer
- Patent number 9,080,253
- Issue date Jul 14, 2015
- Sumco Corporation
- Naoyuki Wada
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing epitaxial wafer
- Patent number 8,753,962
- Issue date Jun 17, 2014
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method for epitaxial wafer
- Patent number 7,960,254
- Issue date Jun 14, 2011
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control method of epitaxial growth apparatus
- Patent number 7,833,348
- Issue date Nov 16, 2010
- Sumco Corporation
- Naoyuki Wada
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for unloading thermally treated non-planar silicon wafers wi...
- Patent number 7,820,554
- Issue date Oct 26, 2010
- Sumco Corporation
- Kazutoshi Inoue
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
FLAT EPITAXIAL WAFER HAVING MINIMAL THICKNESS VARIATION
- Publication number 20230326752
- Publication date Oct 12, 2023
- SUMCO CORPORATION
- Naoyuki WADA
- C30 - CRYSTAL GROWTH
Information Patent Application
CLADDING AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20230311452
- Publication date Oct 5, 2023
- Asahi Kasei Kabushiki Kaisha
- Naoyuki WADA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SILICON WAFER DEFECT INSPECTION METHOD AND SILICON WAFER DEFECT INS...
- Publication number 20230042102
- Publication date Feb 9, 2023
- SUMCO CORPORATION
- Naoyuki WADA
- G01 - MEASURING TESTING
Information Patent Application
VAPOR DEPOSITION DEVICE AND VAPOR DEPOSITION METHOD
- Publication number 20230009579
- Publication date Jan 12, 2023
- SUMCO CORPORATION
- Yu MINAMIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE AND CONTROL METHOD FOR SINGLE-WAFER PROCESSING EPITA...
- Publication number 20220406599
- Publication date Dec 22, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION DEVICE AND CARRIER USED IN SAME
- Publication number 20220228262
- Publication date Jul 21, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION METHOD AND VAPOR DEPOSITION DEVICE
- Publication number 20220199398
- Publication date Jun 23, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION METHOD AND VAPOR DEPOSITION DEVICE
- Publication number 20220199397
- Publication date Jun 23, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION DEVICE
- Publication number 20220064790
- Publication date Mar 3, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION DEVICE AND CARRIER USED IN SAME
- Publication number 20220056613
- Publication date Feb 24, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION DEVICE
- Publication number 20220056581
- Publication date Feb 24, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL WAFER PRODUCTION SYSTEM AND EPITAXIAL WAFER PRODUCTION ME...
- Publication number 20210324536
- Publication date Oct 21, 2021
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING EPITAXIAL WAFER
- Publication number 20210123159
- Publication date Apr 29, 2021
- SUMCO CORPORATION
- Yu MINAMIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF INSPECTING BACK SURFACE OF EPITAXIAL WAFER, EPITAXIAL WAF...
- Publication number 20200072762
- Publication date Mar 5, 2020
- SUMCO CORPORATION
- Keiko MATSUO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUSCEPTOR, EPITAXIAL GROWTH DEVICE, AND EPITAXIAL WAFER
- Publication number 20180135172
- Publication date May 17, 2018
- SUMCO CORPORATION
- Shoji NOGAMI
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR AND EPITAXIAL GROWTH DEVICE
- Publication number 20180100235
- Publication date Apr 12, 2018
- SUMCO CORPORATION
- Shoji NOGAMI
- C30 - CRYSTAL GROWTH
Information Patent Application
PRODUCTION METHOD OF EPITAXIAL SILICON WAFER, VAPOR DEPOSITION EQUI...
- Publication number 20170067181
- Publication date Mar 9, 2017
- SUMCO CORPORATION
- Naoyuki Wada
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL WAFER AND METHOD FOR PRODUCING THE SAME
- Publication number 20120104565
- Publication date May 3, 2012
- SUMCO CORPORATION
- Naoyuki Wada
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR PRODUCING EPITAXIAL SILICON WAFER
- Publication number 20110132255
- Publication date Jun 9, 2011
- SUMCO CORPORATION
- Hideaki KINBARA
- C30 - CRYSTAL GROWTH
Information Patent Application
MANUFACTURING METHOD FOR EPITAXIAL WAFER
- Publication number 20100159679
- Publication date Jun 24, 2010
- SUMCO CORPORATION
- Naoyuki WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING EPITAXIAL WAFER
- Publication number 20100003811
- Publication date Jan 7, 2010
- SUMCO CORPORATION
- Naoyuki Wada
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR MANUFACTURING EPITAXIAL WAFER
- Publication number 20090205562
- Publication date Aug 20, 2009
- SUMCO CORPORATION
- Naoyuki Wada
- C30 - CRYSTAL GROWTH
Information Patent Application
Receiving apparatus and method of controlling a receiving apparatus
- Publication number 20070297754
- Publication date Dec 27, 2007
- Naoyuki Wada
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Tuner unit, information processing apparatus including tuner unit,...
- Publication number 20070146555
- Publication date Jun 28, 2007
- Naoyuki Wada
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Temperature Control Method of Epitaxial Growth Apparatus
- Publication number 20070062439
- Publication date Mar 22, 2007
- Naoyuki Wada
- C30 - CRYSTAL GROWTH
Information Patent Application
Process for producing silicon wafer
- Publication number 20070059150
- Publication date Mar 15, 2007
- SUMCO CORPORATION
- Kazutoshi Inoue
- C30 - CRYSTAL GROWTH

Naoyuki Wada

Person

Patents Grantslast 30 patents

Vapor deposition method and vapor deposition device

Vapor deposition method and vapor deposition device

Vapor deposition device

Epitaxial wafer production system for performing a correction based...

Apparatus and method for manufacturing epitaxial wafer

Susceptor and epitaxial growth device

Method of inspecting back surface of epitaxial wafer, epitaxial waf...

Method for manufacturing epitaxial wafer

Method for producing epitaxial wafer

Manufacturing method for epitaxial wafer

Temperature control method of epitaxial growth apparatus

Method for unloading thermally treated non-planar silicon wafers wi...

Patents Applicationslast 30 patents

FLAT EPITAXIAL WAFER HAVING MINIMAL THICKNESS VARIATION

CLADDING AND METHOD FOR MANUFACTURING THE SAME

SILICON WAFER DEFECT INSPECTION METHOD AND SILICON WAFER DEFECT INS...

VAPOR DEPOSITION DEVICE AND VAPOR DEPOSITION METHOD

CONTROL DEVICE AND CONTROL METHOD FOR SINGLE-WAFER PROCESSING EPITA...

VAPOR DEPOSITION DEVICE AND CARRIER USED IN SAME

VAPOR DEPOSITION METHOD AND VAPOR DEPOSITION DEVICE

VAPOR DEPOSITION METHOD AND VAPOR DEPOSITION DEVICE

VAPOR DEPOSITION DEVICE

VAPOR DEPOSITION DEVICE AND CARRIER USED IN SAME

VAPOR DEPOSITION DEVICE

EPITAXIAL WAFER PRODUCTION SYSTEM AND EPITAXIAL WAFER PRODUCTION ME...

APPARATUS AND METHOD FOR MANUFACTURING EPITAXIAL WAFER

METHOD OF INSPECTING BACK SURFACE OF EPITAXIAL WAFER, EPITAXIAL WAF...

SUSCEPTOR, EPITAXIAL GROWTH DEVICE, AND EPITAXIAL WAFER

SUSCEPTOR AND EPITAXIAL GROWTH DEVICE

PRODUCTION METHOD OF EPITAXIAL SILICON WAFER, VAPOR DEPOSITION EQUI...

EPITAXIAL WAFER AND METHOD FOR PRODUCING THE SAME

METHOD FOR PRODUCING EPITAXIAL SILICON WAFER

MANUFACTURING METHOD FOR EPITAXIAL WAFER

METHOD FOR MANUFACTURING EPITAXIAL WAFER

METHOD FOR MANUFACTURING EPITAXIAL WAFER

Receiving apparatus and method of controlling a receiving apparatus

Tuner unit, information processing apparatus including tuner unit,...

Temperature Control Method of Epitaxial Growth Apparatus

Process for producing silicon wafer