Naruaki Iida

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating apparatus and coating method
- Patent number 12,151,255
- Issue date Nov 26, 2024
- Tokyo Electron Limited
- Hideki Kajiwara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate transfer mechanism and substrate transferring method
- Patent number 11,978,655
- Issue date May 7, 2024
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus and coating method
- Patent number 11,752,515
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Hideki Kajiwara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate transfer mechanism and substrate transferring method
- Patent number 11,705,359
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method for correcting positional di...
- Patent number 10,042,356
- Issue date Aug 7, 2018
- Tokyo Electron Limited
- Naruaki Iida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,818,654
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Masato Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal processing apparatus for thermal processing substrate and p...
- Patent number 9,299,599
- Issue date Mar 29, 2016
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, substrate transfer method, and storage m...
- Patent number 9,214,370
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method and non-trans...
- Patent number 9,082,800
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Suguru Enokida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,985,929
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Suguru Enokida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate holder positioning method and substrate processing system
- Patent number 8,755,935
- Issue date Jun 17, 2014
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding device
- Patent number 8,720,873
- Issue date May 13, 2014
- Tokyo Electron Limited
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 8,707,805
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Arm for wafer transportation for manufacturing semiconductor
- Patent number D701498
- Issue date Mar 25, 2014
- Tokyo Electron Limited
- Naruaki Iida
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Arm for wafer transportation for manufacturing semiconductor
- Patent number D695240
- Issue date Dec 10, 2013
- Tokyo Electron Limited
- Naruaki Iida
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Device and method for supporting a substrate
- Patent number 8,528,889
- Issue date Sep 10, 2013
- Tokyo Electron Limited
- Seiji Nakano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate transfer method and apparatus
- Patent number 8,441,618
- Issue date May 14, 2013
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer holding member
- Patent number D674761
- Issue date Jan 22, 2013
- Tokyo Electron Limited
- Naruaki Iida
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate carrying device, substrate carrying method and computer-r...
- Patent number 8,292,549
- Issue date Oct 23, 2012
- Tokyo Electron Limited
- Naruaki Iida
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate carrying device, substrate carrying method and computer-r...
- Patent number 7,993,081
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Naruaki Iida
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Heating device and heating method
- Patent number 7,758,340
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Masami Akimoto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Detecting apparatus and detecting method
- Patent number 7,470,098
- Issue date Dec 30, 2008
- Tokyo Electron Limited
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,208,066
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Junichi Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of aligning substrate car...
- Patent number 6,915,183
- Issue date Jul 5, 2005
- Tokyo Electron Limited
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,709,545
- Issue date Mar 23, 2004
- Tokyo Electron Limited
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,672,779
- Issue date Jan 6, 2004
- Tokyo Electron Limited
- Issei Ueda
- G08 - SIGNALLING
Information Patent Grant
Method of determining retreat permission position of carrier arm an...
- Patent number 6,643,564
- Issue date Nov 4, 2003
- Tokyo Electron Limited
- Yukinori Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,471,422
- Issue date Oct 29, 2002
- Tokyo Electron Limited
- Issei Ueda
- G07 - CHECKING-DEVICES
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,402,401
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Issei Ueda
- G07 - CHECKING-DEVICES
Information Patent Grant
Transfer device centering method and substrate processing apparatus
- Patent number 6,332,751
- Issue date Dec 25, 2001
- Tokyo Electron Limited
- Seiji Kozawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD
- Publication number 20240249968
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND COATING METHOD
- Publication number 20230347369
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Hideki KAJIWARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD
- Publication number 20230298927
- Publication date Sep 21, 2023
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230106927
- Publication date Apr 6, 2023
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230056038
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTE...
- Publication number 20230021035
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD
- Publication number 20220270912
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND COATING METHOD
- Publication number 20200391238
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Hideki KAJIWARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20200041913
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160358829
- Publication date Dec 8, 2016
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR CORRECTING POSITIONAL DI...
- Publication number 20150235888
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Naruaki IIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus for thermal processing substrate and p...
- Publication number 20140234991
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD, AND STORAGE M...
- Publication number 20130272824
- Publication date Oct 17, 2013
- TOKYO ELECTRON LIMITED
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20130166064
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20130078059
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANS...
- Publication number 20130078061
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING DEVICE
- Publication number 20120235335
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20120224945
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND COMPUTER-R...
- Publication number 20110268511
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND APPARATUS
- Publication number 20100321648
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Masahiro NAKAHARADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE
- Publication number 20100243168
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTING APPARATUS AND DETECTING METHOD
- Publication number 20080100852
- Publication date May 1, 2008
- TOKYO ELECTRON LIMITED
- Naruaki IIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND COMPUTER-R...
- Publication number 20070160454
- Publication date Jul 12, 2007
- TOKYO ELECTRON LIMITED
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070127916
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070128356
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Yuji Matsuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and method of aligning substrate car...
- Publication number 20040253091
- Publication date Dec 16, 2004
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040050321
- Publication date Mar 18, 2004
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of determining retreat permission position of carrier arm an...
- Publication number 20030139852
- Publication date Jul 24, 2003
- TOKYO ELECTRON LIMITED
- Yukinori Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030012575
- Publication date Jan 16, 2003
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020118973
- Publication date Aug 29, 2002
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS

Naruaki Iida

Person

Patents Grantslast 30 patents

Coating apparatus and coating method

Substrate transfer mechanism and substrate transferring method

Coating apparatus and coating method

Substrate transfer mechanism and substrate transferring method

Substrate processing apparatus, method for correcting positional di...

Substrate processing apparatus and substrate processing method

Thermal processing apparatus for thermal processing substrate and p...

Substrate transfer device, substrate transfer method, and storage m...

Substrate treatment system, substrate transfer method and non-trans...

Substrate processing apparatus, substrate processing method and sto...

Substrate holder positioning method and substrate processing system

Substrate holding device

Transfer apparatus and transfer method

Arm for wafer transportation for manufacturing semiconductor

Arm for wafer transportation for manufacturing semiconductor

Device and method for supporting a substrate

Substrate transfer method and apparatus

Wafer holding member

Substrate carrying device, substrate carrying method and computer-r...

Substrate carrying device, substrate carrying method and computer-r...

Heating device and heating method

Detecting apparatus and detecting method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and method of aligning substrate car...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Method of determining retreat permission position of carrier arm an...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Transfer device centering method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

COATING APPARATUS AND COATING METHOD

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTE...

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

COATING APPARATUS AND COATING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD FOR CORRECTING POSITIONAL DI...

Thermal processing apparatus for thermal processing substrate and p...

SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD, AND STORAGE M...

TRANSFER APPARATUS AND TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANS...

SUBSTRATE HOLDING DEVICE

SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND COMPUTER-R...

SUBSTRATE TRANSFER METHOD AND APPARATUS

DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE

DETECTING APPARATUS AND DETECTING METHOD

SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND COMPUTER-R...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate processing apparatus and method of aligning substrate car...

Substrate processing apparatus and substrate processing method

Method of determining retreat permission position of carrier arm an...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method