Natale Ceglio

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for synchronous operation of debris-mitigation...
- Patent number 9,609,731
- Issue date Mar 28, 2017
- Media Lario S.r.l.
- Raymond Merrill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sn vapor EUV LLP source system for EUV lithography
- Patent number 9,585,236
- Issue date Feb 28, 2017
- Media Lario S.R.L.
- Natale M. Ceglio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Source-collector module with GIC mirror and LPP EUV light source
- Patent number 9,057,962
- Issue date Jun 16, 2015
- Media Lario S.r.l.
- Natale M. Ceglio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Source-collector modules for EUV lithography employing a GIC mirror...
- Patent number 8,895,946
- Issue date Nov 25, 2014
- Media Lario S.r.l.
- Natale M. Ceglio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV collector system with enhanced EUV radiation collection
- Patent number 8,873,025
- Issue date Oct 28, 2014
- Media Lario S.r.l.
- Natale M. Ceglio
- G02 - OPTICS
Information Patent Grant
Thermal management systems, assemblies and methods for grazing inci...
- Patent number 8,746,975
- Issue date Jun 10, 2014
- Media Lario S.r.l.
- Giovanni Bianucci
- G02 - OPTICS
Information Patent Grant
Evaporative thermal management of grazing incidence collectors for...
- Patent number 8,731,139
- Issue date May 20, 2014
- Media Lario S.r.l.
- Boris Grek
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Source-collector module with GIC mirror and tin vapor LPP target sy...
- Patent number 8,686,381
- Issue date Apr 1, 2014
- Media Lario S.r.l.
- Richard Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV collector system with enhanced EUV radiation collection
- Patent number 8,587,768
- Issue date Nov 19, 2013
- Media Lario S.r.l.
- Natale M. Ceglio
- G02 - OPTICS
Information Patent Grant
Source-collector module with GIC mirror and tin rod EUV LPP target...
- Patent number 8,344,339
- Issue date Jan 1, 2013
- Media Lario S.R.L.
- Richard A. Levesque
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Source-collector module with GIC mirror and LPP EUV light source
- Patent number 8,330,131
- Issue date Dec 11, 2012
- Media Lario, S.r.L.
- Natale M. Ceglio
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Source-collector module with GIC mirror and xenon liquid EUV LPP ta...
- Patent number 8,258,485
- Issue date Sep 4, 2012
- Media Lario S.R.L.
- Richard A. Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Scalable wafer inspection
- Patent number 6,770,862
- Issue date Aug 3, 2004
- KLA-Tencor Technologies Corporation
- Dragos Maciuca
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR SYNCHRONOUS OPERATION OF DEBRIS-MITIGATION...
- Publication number 20160007435
- Publication date Jan 7, 2016
- Media Lario S.R.L.
- Raymond Merrill
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Sn vapor EUV LLP source system for EUV lithography
- Publication number 20140326904
- Publication date Nov 6, 2014
- MEDIA LARIO S.R.L
- Natale M. Ceglio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Source-collector module wth GIC mirror and LPP EUV light source
- Publication number 20140152967
- Publication date Jun 5, 2014
- Natale M. Ceglio
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EUV collector system with enhanced EUV radiation collection
- Publication number 20140043595
- Publication date Feb 13, 2014
- Media Lario, S.R.L.
- Natale M. Ceglio
- G02 - OPTICS
Information Patent Application
Source-collector modules for EUV lithography employing a GIC mirror...
- Publication number 20130207004
- Publication date Aug 15, 2013
- Media Lario, S.R.L.
- Natale M. Ceglio
- G02 - OPTICS
Information Patent Application
Evaporative thermal management of grazing incidence collectors for...
- Publication number 20120281189
- Publication date Nov 8, 2012
- MEDIA LARIO S.R.L
- Boris Grek
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
THERMAL MANAGEMENT SYSTEMS, ASSEMBLIES AND METHODS FOR GRAZING INCI...
- Publication number 20120212719
- Publication date Aug 23, 2012
- Giovanni Bianucci
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and xenon liquid EUV LPP ta...
- Publication number 20120050704
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Source-collector module with GIC mirror and tin rod EUV LPP target...
- Publication number 20120050708
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and xenon ice EUV LPP targe...
- Publication number 20120050706
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and tin wire EUV LPP target...
- Publication number 20120050707
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and tin vapor LPP target sy...
- Publication number 20110318694
- Publication date Dec 29, 2011
- MEDIA LARIO S.R.L
- Richard Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV collector system with enhanced EUV radiation collection
- Publication number 20110242515
- Publication date Oct 6, 2011
- MEDIA LARIO S.R.L
- Natale M. Ceglio
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and LPP EUV light source
- Publication number 20110168925
- Publication date Jul 14, 2011
- MEDIA LARIO S.R.L
- Natale M. Ceglio
- G02 - OPTICS

Natale Ceglio

Person

Patents Grantslast 30 patents

Systems and methods for synchronous operation of debris-mitigation...

Sn vapor EUV LLP source system for EUV lithography

Source-collector module with GIC mirror and LPP EUV light source

Source-collector modules for EUV lithography employing a GIC mirror...

EUV collector system with enhanced EUV radiation collection

Thermal management systems, assemblies and methods for grazing inci...

Evaporative thermal management of grazing incidence collectors for...

Source-collector module with GIC mirror and tin vapor LPP target sy...

EUV collector system with enhanced EUV radiation collection

Source-collector module with GIC mirror and tin rod EUV LPP target...

Source-collector module with GIC mirror and LPP EUV light source

Source-collector module with GIC mirror and xenon liquid EUV LPP ta...

Scalable wafer inspection

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR SYNCHRONOUS OPERATION OF DEBRIS-MITIGATION...

Sn vapor EUV LLP source system for EUV lithography

Source-collector module wth GIC mirror and LPP EUV light source

EUV collector system with enhanced EUV radiation collection

Source-collector modules for EUV lithography employing a GIC mirror...

Evaporative thermal management of grazing incidence collectors for...

THERMAL MANAGEMENT SYSTEMS, ASSEMBLIES AND METHODS FOR GRAZING INCI...

Source-collector module with GIC mirror and xenon liquid EUV LPP ta...

Source-collector module with GIC mirror and tin rod EUV LPP target...

Source-collector module with GIC mirror and xenon ice EUV LPP targe...

Source-collector module with GIC mirror and tin wire EUV LPP target...

Source-collector module with GIC mirror and tin vapor LPP target sy...

EUV collector system with enhanced EUV radiation collection

Source-collector module with GIC mirror and LPP EUV light source