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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Process chamber component having yttrium—aluminum coating
Patent number
9,012,030
Issue date
Apr 21, 2015
Applied Materials, Inc.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process chamber component having electroplated yttrium containing c...
Patent number
8,114,525
Issue date
Feb 14, 2012
Applied Materials, Inc.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a process chamber component having yttrium-...
Patent number
8,110,086
Issue date
Feb 7, 2012
Applied Materials, Inc.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electroplating an yttrium-containing coating on a chamber component
Patent number
7,833,401
Issue date
Nov 16, 2010
Applied Materials, Inc.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process chamber component having electroplated yttrium containing c...
Patent number
7,371,467
Issue date
May 13, 2008
Applied Materials, Inc.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process chamber having component with yttrium-aluminum coating
Patent number
6,942,929
Issue date
Sep 13, 2005
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating boron carbide on aluminum
Patent number
6,808,747
Issue date
Oct 26, 2004
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing using a member comprising an oxide of a group...
Patent number
6,641,697
Issue date
Nov 4, 2003
Applied Materials, Inc.
Nianci Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavy and roughened dome in plasma processing reactor
Patent number
6,623,595
Issue date
Sep 23, 2003
Applied Materials, Inc.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Corrosion-resistant protective coating for an apparatus and method...
Patent number
6,592,707
Issue date
Jul 15, 2003
Applied Materials Inc.
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Diamond coated parts in a plasma reactor
Patent number
6,508,911
Issue date
Jan 21, 2003
Applied Materials Inc.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for recovering metal from etch by-products
Patent number
6,413,389
Issue date
Jul 2, 2002
Applied Materials, Inc.
Hong Shih
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Ceramic composition for an apparatus and method for processing a su...
Patent number
6,352,611
Issue date
Mar 5, 2002
Applied Materials, Inc.
Nianci Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ceramic composition for an apparatus and method for processing a su...
Patent number
6,123,791
Issue date
Sep 26, 2000
Applied Materials, Inc.
Nianci Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Boron carbide parts and coatings in a plasma reactor
Patent number
6,120,640
Issue date
Sep 19, 2000
Applied Materials, Inc.
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon carbide composite article particularly useful for plasma re...
Patent number
5,904,778
Issue date
May 18, 1999
Applied Materials, Inc.
Hao A Lu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF FORMING A PROCESS CHAMBER COMPONENT HAVING ELECTROPLATED...
Publication number
20120138472
Publication date
Jun 7, 2012
APPLIED MATERIALS, INC.
Nianci Han
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PROCESS CHAMBER COMPONENT HAVING YTTRIUM-ALUMINUM COATING
Publication number
20120135155
Publication date
May 31, 2012
APPLIED MATERIALS, INC.
Nianci Han
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Process chamber component having electroplated yttrium containing c...
Publication number
20080223725
Publication date
Sep 18, 2008
Applied Materials, Inc.
Nianci Han
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Process chamber component having yttrium-aluminum coating
Publication number
20080110760
Publication date
May 15, 2008
APPLIED MATERIALS, INC.
Nianci Han
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
FORMING A CHAMBER COMPONENT HAVING A YTTRIUM-CONTAINING COATING
Publication number
20080017516
Publication date
Jan 24, 2008
APPLIED MATERIALS, INC.
Nianci Han
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Bonded multi-layer RF window
Publication number
20070079936
Publication date
Apr 12, 2007
Applied Materials, Inc.
Maocheng Li
B32 - LAYERED PRODUCTS
Information
Patent Application
Process chamber component having electroplated yttrium containing c...
Publication number
20040191545
Publication date
Sep 30, 2004
APPLIED MATERIALS, INC.
Nianci Han
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Cleaning ceramic surfaces
Publication number
20030190870
Publication date
Oct 9, 2003
APPLIED MATERIALS, INC.
Hong Shih
B08 - CLEANING
Information
Patent Application
Process chamber having component with yttrium-aluminum coating
Publication number
20030127049
Publication date
Jul 10, 2003
APPLIED MATERIALS, INC.
Nianci Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing using a member comprising an oxide of a group...
Publication number
20020100554
Publication date
Aug 1, 2002
APPLIED MATERIALS, INC.
Nianci Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Corrosion-resistant protective coating for an apparatus and method...
Publication number
20020066532
Publication date
Jun 6, 2002
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...