Nicole Auth

Person

Gustavsburg, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for determining a position of an element on a...
- Patent number 11,650,495
- Issue date May 16, 2023
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for processing a microstructured component
- Patent number 11,487,211
- Issue date Nov 1, 2022
- Carl Zeiss SMT GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for determining a position of an element on a...
- Patent number 11,385,540
- Issue date Jul 12, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
Method for electron beam induced etching
- Patent number 9,023,666
- Issue date May 5, 2015
- Carl Zeiss SMS GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for electron beam induced etching of layers contaminated wit...
- Patent number 8,632,687
- Issue date Jan 21, 2014
- Carl Zeiss SMS GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for removing a material from a sample
- Patent number 8,623,230
- Issue date Jan 7, 2014
- Carl Zeiss SMS GmbH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for electron beam induced deposition of conductive material
- Patent number 8,318,593
- Issue date Nov 27, 2012
- Carl Zeiss SMS GmbH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...
- Publication number 20240272099
- Publication date Aug 15, 2024
- Carl Zeiss SMT GMBH
- Daniel Schwarz
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING OPTICAL PROPERTIES OF DEPOSITI...
- Publication number 20240219844
- Publication date Jul 4, 2024
- Carl Zeiss SMT GMBH
- Nicole Auth
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR REPAIRING A DEFECT OF A SAMPLE USING A FOC...
- Publication number 20240186109
- Publication date Jun 6, 2024
- Carl Zeiss SMT GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
- Publication number 20230280647
- Publication date Sep 7, 2023
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...
- Publication number 20230238209
- Publication date Jul 27, 2023
- Carl Zeiss SMT GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...
- Publication number 20230238213
- Publication date Jul 27, 2023
- Carl Zeiss SMT GMBH
- Ottmar Hoinkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...
- Publication number 20220334469
- Publication date Oct 20, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PROCESSING A MICROSTRUCTURED COMPONENT
- Publication number 20210173310
- Publication date Jun 10, 2021
- Carl Zeiss SMT GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES AND METHODS FOR EXAMINING AND/OR PROCESSING AN ELEMENT FOR...
- Publication number 20210132594
- Publication date May 6, 2021
- Carl Zeiss SMT GMBH
- Michael Budach
- G05 - CONTROLLING REGULATING
Information Patent Application
APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...
- Publication number 20200233299
- Publication date Jul 23, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...
- Publication number 20140255831
- Publication date Sep 11, 2014
- Thorsten Hofmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED ETCHING
- Publication number 20110183444
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED DEPOSITION OF CONDUCTIVE MATERIAL
- Publication number 20110183517
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED ETCHING OF LAYERS CONTAMINATED WIT...
- Publication number 20110183523
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR REMOVING A MATERIAL FROM A SAMPLE
- Publication number 20100282596
- Publication date Nov 11, 2010
- NAWOTEC GMBH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Nicole Auth

Person

Patents Grantslast 30 patents

Apparatus and method for determining a position of an element on a...

Device and method for processing a microstructured component

Apparatus and method for determining a position of an element on a...

Method for electron beam induced etching

Method for electron beam induced etching of layers contaminated wit...

Methods and systems for removing a material from a sample

Method for electron beam induced deposition of conductive material

Patents Applicationslast 30 patents

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...

METHOD AND APPARATUS FOR DETERMINING OPTICAL PROPERTIES OF DEPOSITI...

METHOD AND APPARATUS FOR REPAIRING A DEFECT OF A SAMPLE USING A FOC...

METHOD AND APPARATUS FOR MASK REPAIR

APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...

APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...

APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...

DEVICE AND METHOD FOR PROCESSING A MICROSTRUCTURED COMPONENT

DEVICES AND METHODS FOR EXAMINING AND/OR PROCESSING AN ELEMENT FOR...

APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...

METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...

METHOD FOR ELECTRON BEAM INDUCED ETCHING

METHOD FOR ELECTRON BEAM INDUCED DEPOSITION OF CONDUCTIVE MATERIAL

METHOD FOR ELECTRON BEAM INDUCED ETCHING OF LAYERS CONTAMINATED WIT...

METHODS AND SYSTEMS FOR REMOVING A MATERIAL FROM A SAMPLE