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Nigel P. Smith
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Hsinchu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Multilayer alignment and overlay target and measurement method
Patent number
8,339,605
Issue date
Dec 25, 2012
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi layer alignment and overlay target and measurement method
Patent number
8,107,079
Issue date
Jan 31, 2012
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi layer alignment and overlay target and measurement method
Patent number
7,876,439
Issue date
Jan 25, 2011
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay measurement target
Patent number
7,847,939
Issue date
Dec 7, 2010
Nanometrics Incorporated
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determining overlay error using an in-chip overlay target
Patent number
7,808,643
Issue date
Oct 5, 2010
Nanometrics Incorporated
Nigel P. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for designing gratings
Patent number
7,800,824
Issue date
Sep 21, 2010
Industrial Technology Research Institute
Shih Chun Wang
G02 - OPTICS
Information
Patent Grant
Method for measuring dimensions and optical system using the same
Patent number
7,619,753
Issue date
Nov 17, 2009
Industrial Technology Research Institute
An-Shun Liu
G01 - MEASURING TESTING
Information
Patent Grant
Scatterometry method with characteristic signatures matching
Patent number
7,532,317
Issue date
May 12, 2009
Industrial Technology Research Institute
Nigel Smith
G01 - MEASURING TESTING
Information
Patent Grant
Methods and systems for determining overlay error based on target i...
Patent number
7,477,396
Issue date
Jan 13, 2009
Nanometrics Incorporated
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging tool calibration artifact and method
Patent number
7,473,502
Issue date
Jan 6, 2009
International Business Machines Corporation
Chistopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-layer alignment and overlay target and measurement method
Patent number
7,474,401
Issue date
Jan 6, 2009
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay measurement target
Patent number
7,379,184
Issue date
May 27, 2008
Nanometrics Incorporated
Nigel Peter Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for inspecting a grating biochip
Patent number
7,355,713
Issue date
Apr 8, 2008
Industrial Technology Research Institute
Deh Ming Shyu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
MULTILAYER ALIGNMENT AND OVERLAY TARGET AND MEASUREMENT METHOD
Publication number
20110069314
Publication date
Mar 24, 2011
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI LAYER ALIGNMENT AND OVERLAY TARGET AND MEASUREMENT METHOD
Publication number
20110058170
Publication date
Mar 10, 2011
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging Diffraction Based Overlay
Publication number
20090296075
Publication date
Dec 3, 2009
Nanometrics Incorporated
Jiangtao Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Determining Overlay Error Using an In-chip Overlay Target
Publication number
20090116014
Publication date
May 7, 2009
Nanometrics Incorporated
Nigel P. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI LAYER ALIGNMENT AND OVERLAY TARGET AND MEASUREMENT METHOD
Publication number
20080259334
Publication date
Oct 23, 2008
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Overlay Measurement Target
Publication number
20080217794
Publication date
Sep 11, 2008
Industrial Technology Research Institute
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DESIGNING GRATINGS
Publication number
20080013176
Publication date
Jan 17, 2008
Industrial Technology Research Institute
Shih Chun Wang
G02 - OPTICS
Information
Patent Application
Overlay Metrology Mark
Publication number
20070222088
Publication date
Sep 27, 2007
AOTI Operating Company, Inc,
Nigel P. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MEASURING DIMENSIONS AND OPTICAL SYSTEM USING THE SAME
Publication number
20070188771
Publication date
Aug 16, 2007
Industrial Technology Research Institute
An-Shun Liu
G01 - MEASURING TESTING
Information
Patent Application
Method for Inspecting a Grating Biochip
Publication number
20070156349
Publication date
Jul 5, 2007
Industrial Technology Research Institute
Deh Ming Shyu
G01 - MEASURING TESTING
Information
Patent Application
Overlay metrology mark
Publication number
20070069398
Publication date
Mar 29, 2007
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Multi-layer Alignment and Overlay Target and Measurement Method
Publication number
20070058169
Publication date
Mar 15, 2007
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and systems for determining overlay error based on target i...
Publication number
20060197950
Publication date
Sep 7, 2006
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Overlay measurement target
Publication number
20060151890
Publication date
Jul 13, 2006
Accent Optical Technologies, Inc.
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scatterometry method with characteristic signatures matching
Publication number
20060146347
Publication date
Jul 6, 2006
Nigel Smith
G01 - MEASURING TESTING
Information
Patent Application
Method for designing an overlay mark
Publication number
20060117293
Publication date
Jun 1, 2006
Nigel Smith
G02 - OPTICS