Noboru SUDA

Person

  • Kyoto, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Reaction chamber for vapor deposition apparatus

    • Patent number 10,927,456
    • Issue date Feb 23, 2021
    • Hermes-Epitek Corp.
    • Yu-Sheng Liang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vapor phase film deposition apparatus

    • Patent number 10,844,490
    • Issue date Nov 24, 2020
    • Hermes-Epitek Corp.
    • Noboru Suda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Chemical vapor deposition apparatus

    • Patent number 10,208,378
    • Issue date Feb 19, 2019
    • Hermes-Epitek Corp.
    • Junji Komeno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    REACTION CHAMBER FOR VAPOR DEPOSITION APPARATUS

    • Publication number 20200017964
    • Publication date Jan 16, 2020
    • HERMES-EPITEK CORP.
    • Yu-Sheng LIANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR PHASE FILM DEPOSITION APPARATUS

    • Publication number 20190376179
    • Publication date Dec 12, 2019
    • HERMES-EPITEK CORP.
    • NOBORU SUDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR PHASE FILM-FORMING APPARATUS

    • Publication number 20180230595
    • Publication date Aug 16, 2018
    • HERMES-EPITEK CORPORATION
    • Noboru Suda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL VAPOR DEPOSITION APPARATUS

    • Publication number 20180163301
    • Publication date Jun 14, 2018
    • HERMES-EPITEK CORP.
    • JUNJI KOMENO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS INJECTOR DEVICE USED FOR SEMICONDUCTOR EQUIPMENT

    • Publication number 20180163304
    • Publication date Jun 14, 2018
    • HERMES-EPITEK CORPORATION
    • Po-Jung Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas Distribution Apparatus for Deposition System

    • Publication number 20180119277
    • Publication date May 3, 2018
    • HERMES-EPITEK CORPORATION
    • Junji Komeno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR PHASE FILM DEPOSITION APPARATUS

    • Publication number 20150096496
    • Publication date Apr 9, 2015
    • HERMES-EPITEK CORPORATION
    • Noboru SUDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...