Nobuo Konishi

Person

Kofu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,300,598
- Issue date Nov 27, 2007
- Tokyo Electron Limited
- Nobuo Konishi
- B08 - CLEANING
Information Patent Grant
Film forming method by radiating a plasma on a surface of a low die...
- Patent number 6,800,546
- Issue date Oct 5, 2004
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,683,006
- Issue date Jan 27, 2004
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and film forming system
- Patent number 6,656,273
- Issue date Dec 2, 2003
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus
- Patent number 6,551,400
- Issue date Apr 22, 2003
- Tokyo Electron Limited
- Keizo Hasbe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist processing method and resist processing apparatus
- Patent number 6,514,073
- Issue date Feb 4, 2003
- Tokyo Electron Limited
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,503,003
- Issue date Jan 7, 2003
- Tokyo Electron Limited
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,491,452
- Issue date Dec 10, 2002
- Tokyo Electron Limited
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process solution supplying apparatus
- Patent number 6,431,258
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scrubbing apparatus
- Patent number 6,385,805
- Issue date May 14, 2002
- Tokyo Electron Limited
- Nobuo Konishi
- B08 - CLEANING
Information Patent Grant
Process solution supplying apparatus
- Patent number 6,383,291
- Issue date May 7, 2002
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming resist film
- Patent number 6,300,043
- Issue date Oct 9, 2001
- Tokyo Electron Limited
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for developing front surface of substrate with improved deve...
- Patent number 6,257,778
- Issue date Jul 10, 2001
- Tokyo Electron Limited
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,238,848
- Issue date May 29, 2001
- Tokyo Electron Limited
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,228,561
- Issue date May 8, 2001
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process solution supplying apparatus
- Patent number 6,165,270
- Issue date Dec 26, 2000
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist processing method
- Patent number 6,143,478
- Issue date Nov 7, 2000
- Tokyo Electron Limited
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polishing apparatus, polishing member
- Patent number 6,120,361
- Issue date Sep 19, 2000
- Tokyo Electron Limited
- Nobuo Konishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system
- Patent number 6,106,369
- Issue date Aug 22, 2000
- Tokyo Electron Limited
- Nobuo Konishi
- B24 - GRINDING POLISHING
Information Patent Grant
Coating apparatus
- Patent number 6,053,977
- Issue date Apr 25, 2000
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for forming liquid film
- Patent number 6,012,858
- Issue date Jan 11, 2000
- Tokyo Electron Limited
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 6,001,739
- Issue date Dec 14, 1999
- Tokyo Electron Limited
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system
- Patent number 5,826,129
- Issue date Oct 20, 1998
- Tokyo Electron Limited
- Keizo Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for polishing
- Patent number 5,722,875
- Issue date Mar 3, 1998
- Tokyo Electron Limited
- Mitsuaki Iwashita
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for removing process liquid
- Patent number 5,608,943
- Issue date Mar 11, 1997
- Tokyo Electron Limited
- Nobuo Konishi
- B08 - CLEANING
Information Patent Grant
Method for applying process solution to substrates
- Patent number 5,416,047
- Issue date May 16, 1995
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus with nozzle moving means
- Patent number 5,250,114
- Issue date Oct 5, 1993
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Processing device and processing method
- Publication number 20050260771
- Publication date Nov 24, 2005
- Mitsuaki Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20050026454
- Publication date Feb 3, 2005
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and apparatus
- Publication number 20040187896
- Publication date Sep 30, 2004
- Nobuo Konishi
- B08 - CLEANING
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20040127019
- Publication date Jul 1, 2004
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20020197878
- Publication date Dec 26, 2002
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20020177298
- Publication date Nov 28, 2002
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010014224
- Publication date Aug 16, 2001
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Developing method and developing apparatus
- Publication number 20010012456
- Publication date Aug 9, 2001
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCRUBBING APPARATUS
- Publication number 20010010103
- Publication date Aug 2, 2001
- NOBUO KONISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010009135
- Publication date Jul 26, 2001
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Nobuo Konishi

Person

Patents Grantslast 30 patents

Substrate processing method and apparatus

Film forming method by radiating a plasma on a surface of a low die...

Film forming method and film forming apparatus

Film forming method and film forming system

Coating apparatus

Resist processing method and resist processing apparatus

Film forming method and film forming apparatus

Developing method and developing apparatus

Process solution supplying apparatus

Scrubbing apparatus

Process solution supplying apparatus

Method of forming resist film

Method for developing front surface of substrate with improved deve...

Developing method and developing apparatus

Film forming method and film forming apparatus

Process solution supplying apparatus

Resist processing method

Polishing apparatus, polishing member

Polishing system

Coating apparatus

Apparatus and method for forming liquid film

Method of manufacturing a semiconductor device

Substrate processing system

Method and apparatus for polishing

Apparatus for removing process liquid

Method for applying process solution to substrates

Coating apparatus with nozzle moving means

Patents Applicationslast 30 patents

Processing device and processing method

Film forming method and film forming apparatus

Substrate processing method and apparatus

Film forming method and film forming apparatus

Film forming method and film forming apparatus

Film forming method and film forming apparatus

Film forming method and film forming apparatus

Developing method and developing apparatus

SCRUBBING APPARATUS

Film forming method and film forming apparatus