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Nobutaka Nakao

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,276,405
    • Issue date Apr 30, 2019
    • Tokyo Electron Limited
    • Akinori Miyata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Evacuation method and vacuum processing apparatus
    • Patent number 9,984,907
    • Issue date May 29, 2018
    • Tokyo Electron Limited
    • Hirofumi Haga
    • A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 8,142,609
    • Issue date Mar 27, 2012
    • Tokyo Electron Limited
    • Syuichi Takahashi
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents