Nobuyuki Kosaka

Person

Amagasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor producing apparatus, and wafer vacuum chucking device...
- Patent number 5,976,260
- Issue date Nov 2, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Yoshimi Kinoshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor producing apparatus comprising wafer vacuum chucking...
- Patent number 5,534,073
- Issue date Jul 9, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Yoshimi Kinoshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Code reading pattern and an image pickup apparatus for reading the...
- Patent number 5,481,095
- Issue date Jan 2, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Hiroshi Mitsuda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of manufacturing a spatial frequency filter for use in a pat...
- Patent number 5,379,150
- Issue date Jan 3, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Yoko Miyazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Light transmission type vacuum separating window and soft X-ray tra...
- Patent number 5,317,618
- Issue date May 31, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Takehiko Nakahara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Thin film forming apparatus
- Patent number 5,305,366
- Issue date Apr 19, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Takehiko Nakahara
- G01 - MEASURING TESTING
Information Patent Grant
Pattern defect detection device and a spatial frequency filter used...
- Patent number 5,289,260
- Issue date Feb 22, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Yoko Miyazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection device for detecting defects in a periodic pattern on a...
- Patent number 5,170,063
- Issue date Dec 8, 1992
- Mitsubishi Denki Kabushiki Kaisha
- Yoko Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Nobuyuki Kosaka

Person

Patents Grantslast 30 patents

Semiconductor producing apparatus, and wafer vacuum chucking device...

Semiconductor producing apparatus comprising wafer vacuum chucking...

Code reading pattern and an image pickup apparatus for reading the...

Method of manufacturing a spatial frequency filter for use in a pat...

Light transmission type vacuum separating window and soft X-ray tra...

Thin film forming apparatus

Pattern defect detection device and a spatial frequency filter used...

Inspection device for detecting defects in a periodic pattern on a...