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Extreme ultraviolet light source
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Publication number 20100176313
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Publication date Jul 15, 2010
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Cymer, Inc.
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Stephan T. Melnychuk
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Drive laser for EUV light source
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Publication number 20090161201
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Publication date Jun 25, 2009
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Cymer, Inc.
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Alexander I. Ershov
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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EUV optics
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Publication number 20080043321
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Publication date Feb 21, 2008
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Cymer, Inc.
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Norbert R. Bowering
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G02 - OPTICS
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Extreme ultraviolet light source
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Publication number 20080023657
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Publication date Jan 31, 2008
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Cymer, Inc.
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Stephen T. Melnychuk
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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EUV light source
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Publication number 20070158596
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Publication date Jul 12, 2007
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I. Roger Oliver
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Collector for EUV light source
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Publication number 20070114469
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Publication date May 24, 2007
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William N. Partlo
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Collector for EUV light source
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Publication number 20070114470
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Publication date May 24, 2007
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Norbert Bowering
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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EUV light source
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Publication number 20070102653
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Publication date May 10, 2007
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Cymer, Inc.
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Norbert R. Bowering
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Collector for EUV light source
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Publication number 20060131515
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Publication date Jun 22, 2006
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William N. Partlo
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Extreme ultraviolet light source
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Publication number 20050230645
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Publication date Oct 20, 2005
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Cymer, Inc.
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Stephan T. Melnychuk
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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LPP EUV light source
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Publication number 20050205811
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Publication date Sep 22, 2005
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William N. Partlo
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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EUV light source
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Publication number 20050199829
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Publication date Sep 15, 2005
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William N. Partlo
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Extreme ultraviolet light source
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Publication number 20040108473
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Publication date Jun 10, 2004
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Stephan T. Melnychuk
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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