Noriaki Imai

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 8,703,002
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Tatsuo Matsudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive coupling plasma processing apparatus
- Patent number 7,767,055
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method
- Patent number 7,758,929
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Yohei Yamazawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20130122714
- Publication date May 16, 2013
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20100252198
- Publication date Oct 7, 2010
- TOKYO ELECTRON LIMITED
- Yohei YAMAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20090047795
- Publication date Feb 19, 2009
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20070228009
- Publication date Oct 4, 2007
- TOKYO ELECTRON LIMITED
- Yohei YAMAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitive coupling plasma processing apparatus
- Publication number 20060118044
- Publication date Jun 8, 2006
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitive coupling plasma processing apparatus
- Publication number 20060081337
- Publication date Apr 20, 2006
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS