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Noriaki MICHITA
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Toyama-shi, JP
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last 30 patents
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,264,253
Issue date
Mar 1, 2022
Kokusai Electric Corporation
Shinya Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,018,033
Issue date
May 25, 2021
Kokusai Electric Corporation
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
10,804,110
Issue date
Oct 13, 2020
Kokusai Electric Corporation
Shinya Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
10,381,241
Issue date
Aug 13, 2019
Kokusai Electric Corporation
Kazuhiro Yuasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
Patent number
9,748,132
Issue date
Aug 29, 2017
Hitachi Kokusai Electric Inc.
Koichiro Harada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230307267
Publication date
Sep 28, 2023
Kokusai Electric Corporation
Katsuhiko YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230307230
Publication date
Sep 28, 2023
Kokusai Electric Corporation
Takashi NAKAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230189407
Publication date
Jun 15, 2023
Kokusai Electric Corporation
Katsuhiko YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20220384206
Publication date
Dec 1, 2022
Kokusai Electric Corporation
Shinya Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...
Publication number
20220093435
Publication date
Mar 24, 2022
Kokusai Electric Corporation
Kenji SHINOZAKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20200013646
Publication date
Jan 9, 2020
Kokusai Electric Corporation
Shinya SASAKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20190393056
Publication date
Dec 26, 2019
Kokusai Electric Corporation
Yukitomo HIROCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20190198331
Publication date
Jun 27, 2019
Kokusai Electric Corporation
Shinya SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20180204735
Publication date
Jul 19, 2018
Hitachi Kokusai Electric Inc.
Kazuhiro YUASA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
Publication number
20120252220
Publication date
Oct 4, 2012
Hitachi Kokusai Electric Inc.
Koichiro HARADA
H01 - BASIC ELECTRIC ELEMENTS