Norman Baer

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 10,684,551
- Issue date Jun 16, 2020
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 10,317,802
- Issue date Jun 11, 2019
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 10,031,423
- Issue date Jul 24, 2018
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 9,746,778
- Issue date Aug 29, 2017
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical arrangement, EUV lithography apparatus and method for confi...
- Patent number 9,671,703
- Issue date Jun 6, 2017
- Carl Zeiss SMT GmbH
- Norman Baer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror, projection objective with such mirror, and projection expos...
- Patent number 9,575,224
- Issue date Feb 21, 2017
- Carl Zeiss SMT GmbH
- Rolf Freimann
- B82 - NANO-TECHNOLOGY
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 9,316,929
- Issue date Apr 19, 2016
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Arrangement for mirror temperature measurement and/or thermal actua...
- Patent number 9,207,541
- Issue date Dec 8, 2015
- Carl Zeiss SMT GmbH
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Imaging optics
- Patent number 9,201,226
- Issue date Dec 1, 2015
- Carl Zeiss SMT GmbH
- Ulrich Loering
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
- Publication number 20230324648
- Publication date Oct 12, 2023
- Carl Zeiss SMT GMBH
- Andre Dirauf
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM
- Publication number 20230176492
- Publication date Jun 8, 2023
- Carl Zeiss SMT GMBH
- Toralf GRUNER
- G02 - OPTICS
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20190310555
- Publication date Oct 10, 2019
- Carl Zeiss SMT GMBH
- Norman Baer
- G02 - OPTICS
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20180299784
- Publication date Oct 18, 2018
- Carl Zeiss SMT GMBH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20170315449
- Publication date Nov 2, 2017
- Carl Zeiss SMT GMBH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20160195818
- Publication date Jul 7, 2016
- Carl Zeiss SMT GMBH
- Norman Baer
- G02 - OPTICS
Information Patent Application
OPTICAL ARRANGEMENT, EUV LITHOGRAPHY APPARATUS AND METHOD FOR CONFI...
- Publication number 20140300876
- Publication date Oct 9, 2014
- Norman Baer
- G02 - OPTICS
Information Patent Application
MIRROR, PROJECTION OBJECTIVE WITH SUCH MIRROR, AND PROJECTION EXPOS...
- Publication number 20130286471
- Publication date Oct 31, 2013
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- B82 - NANO-TECHNOLOGY
Information Patent Application
Arrangement for mirror temperature measurement and/or thermal actua...
- Publication number 20130176544
- Publication date Jul 11, 2013
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
EUV Exposure Apparatus
- Publication number 20130141707
- Publication date Jun 6, 2013
- ASML NETHERLANDS B.V.
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMAGING OPTICS
- Publication number 20120208115
- Publication date Aug 16, 2012
- Carl Zeiss SMT GMBH
- Ulrich Loering
- G02 - OPTICS
Information Patent Application
Optical element
- Publication number 20100321649
- Publication date Dec 23, 2010
- Carl Zeiss SMT AG
- Norman Baer
- G02 - OPTICS

Norman Baer

Person

Patents Grantslast 30 patents

EUV exposure apparatus with reflective elements having reduced infl...

EUV exposure apparatus with reflective elements having reduced infl...

EUV exposure apparatus with reflective elements having reduced infl...

EUV exposure apparatus with reflective elements having reduced infl...

Optical arrangement, EUV lithography apparatus and method for confi...

Mirror, projection objective with such mirror, and projection expos...

EUV exposure apparatus with reflective elements having reduced infl...

Arrangement for mirror temperature measurement and/or thermal actua...

Imaging optics

Patents Applicationslast 30 patents

OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM

OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

OPTICAL ARRANGEMENT, EUV LITHOGRAPHY APPARATUS AND METHOD FOR CONFI...

MIRROR, PROJECTION OBJECTIVE WITH SUCH MIRROR, AND PROJECTION EXPOS...

Arrangement for mirror temperature measurement and/or thermal actua...

EUV Exposure Apparatus

IMAGING OPTICS

Optical element