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Chemical delivery apparatus for CVD or ALD
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Patent number 7,832,432
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Issue date Nov 16, 2010
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Applied Materials, Inc.
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Norman Nakashima
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Chemical delivery apparatus for CVD or ALD
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Patent number 7,748,400
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Issue date Jul 6, 2010
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Applied Materials, Inc.
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Norman Nakashima
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Chemical delivery apparatus for CVD or ALD
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Patent number 7,568,495
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Issue date Aug 4, 2009
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Applied Materials, Inc.
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Norman Nakashima
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Chemical delivery apparatus for CVD or ALD
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Patent number 7,562,672
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Issue date Jul 21, 2009
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Applied Materials, Inc.
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Norman Nakashima
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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