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Plasma processing apparatus
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Issue date Feb 20, 2024
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Tokyo Electron Limited
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Naohiko Okunishi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
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Patent number 11,501,958
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Issue date Nov 15, 2022
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Tokyo Electron Limited
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Naohiko Okunishi
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H01 - BASIC ELECTRIC ELEMENTS
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-
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Method for designing filter
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Patent number 10,651,813
-
Issue date May 12, 2020
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Tokyo Electron Limited
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Nozomu Nagashima
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G06 - COMPUTING CALCULATING COUNTING
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Plasma processing apparatus
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Patent number 10,096,454
-
Issue date Oct 9, 2018
-
Tokyo Electron Limited
-
Naohiko Okunishi
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H01 - BASIC ELECTRIC ELEMENTS