Oleg Byl

Person

Southbury, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for storing molecular diborane
- Patent number 12,140,272
- Issue date Nov 12, 2024
- Entegris, Inc.
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and systems useful for producing aluminum ions
- Patent number 11,881,376
- Issue date Jan 23, 2024
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
- Patent number 11,827,973
- Issue date Nov 28, 2023
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation system with mixture of arc chamber materials
- Patent number 11,682,540
- Issue date Jun 20, 2023
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma immersion methods for ion implantation
- Patent number 11,621,148
- Issue date Apr 4, 2023
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
- Patent number 11,299,802
- Issue date Apr 12, 2022
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation system with mixture of arc chamber materials
- Patent number 11,139,145
- Issue date Oct 5, 2021
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon implantation in substrates and provision of silicon precurs...
- Patent number 11,062,906
- Issue date Jul 13, 2021
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation processes and apparatus using gallium
- Patent number 10,892,137
- Issue date Jan 12, 2021
- Entegris, Inc.
- Joseph D. Sweeney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation processes and apparatus
- Patent number 10,497,532
- Issue date Dec 3, 2019
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon materials for carbon implantation
- Patent number 10,497,569
- Issue date Dec 3, 2019
- Entegris, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carbon dopant gas and co-flow for implant beam and source life perf...
- Patent number 10,354,877
- Issue date Jul 16, 2019
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phosphorus or arsenic ion implantation utilizing enhanced source te...
- Patent number 10,109,488
- Issue date Oct 23, 2018
- Entegris, Inc.
- Oleg Byl
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Preparation of high pressure BF3/H2 mixtures
- Patent number 9,996,090
- Issue date Jun 12, 2018
- Entegris, Inc.
- Oleg Byl
- G05 - CONTROLLING REGULATING
Information Patent Grant
Ion source cleaning in semiconductor processing systems
- Patent number 9,991,095
- Issue date Jun 5, 2018
- Entegris, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carbon dopant gas and co-flow for implant beam and source life perf...
- Patent number 9,960,042
- Issue date May 1, 2018
- Entegris Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
B2F4 manufacturing process
- Patent number 9,938,156
- Issue date Apr 10, 2018
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ion implantation compositions, systems, and methods
- Patent number 9,831,063
- Issue date Nov 28, 2017
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for preparation of compounds or intermediates...
- Patent number 9,764,298
- Issue date Sep 19, 2017
- Entegris, Inc.
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 9,685,304
- Issue date Jun 20, 2017
- Entegris, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Cluster ion implantation of arsenic and phosphorus
- Patent number 9,269,582
- Issue date Feb 23, 2016
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for preparation of compounds or intermediates...
- Patent number 9,205,392
- Issue date Dec 8, 2015
- Entegris, Inc.
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 9,142,387
- Issue date Sep 22, 2015
- Entegris, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ion implantation system and method
- Patent number 9,111,860
- Issue date Aug 18, 2015
- Entegris, Inc.
- Edward E. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation system and method
- Patent number 8,796,131
- Issue date Aug 5, 2014
- Advanced Technology Materials, Inc.
- Edward E. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of semiconductor processing systems
- Patent number 8,603,252
- Issue date Dec 10, 2013
- Advanced Technology Materials, Inc.
- Frank Dimeo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 8,598,022
- Issue date Dec 3, 2013
- Advanced Technology Materials, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 8,138,071
- Issue date Mar 20, 2012
- Advanced Technology Materials, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 8,062,965
- Issue date Nov 22, 2011
- Advanced Technology Materials, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS
- Publication number 20240136145
- Publication date Apr 25, 2024
- Entegris, Inc.
- Ying TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR STORING MOLECULAR DIBORANE
- Publication number 20230235856
- Publication date Jul 27, 2023
- Entegris, Inc.
- Oleg Byl
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
STORAGE AND DELIVERY VESSEL FOR STORING GeH4, USING A ZEOLITIC ADSO...
- Publication number 20230227309
- Publication date Jul 20, 2023
- Entegris, Inc.
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ADSORBENT-TYPE STORAGE AND DELIVERY VESSELS WITH HIGH PURITY DELIVE...
- Publication number 20230094492
- Publication date Mar 30, 2023
- Entegris, Inc.
- Oleg Byl
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
VESSELS AND METHODS FOR STORING AND DELIVERY A REAGENT
- Publication number 20220349528
- Publication date Nov 3, 2022
- Entegris, Inc.
- Oleg Byl
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
METAL-ORGANIC-FRAMEWORK-CONTAINING BODIES AND RELATED METHODS
- Publication number 20220234105
- Publication date Jul 28, 2022
- Entegris, Inc.
- Edward A. Sturm
- B22 - CASTING POWDER METALLURGY
Information Patent Application
GAS STORAGE SYSTEMS AND METHOD THEREOF
- Publication number 20220194804
- Publication date Jun 23, 2022
- Entegris, Inc.
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Application
GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATI...
- Publication number 20220186358
- Publication date Jun 16, 2022
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adso...
- Publication number 20220112986
- Publication date Apr 14, 2022
- Entegris, Inc.
- Oleg BYL
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Method and Systems Useful for Producing Aluminum Ions
- Publication number 20220108863
- Publication date Apr 7, 2022
- Entegris, Inc.
- Ying TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINATED COMPOSITIONS FOR ION SOURCE PERFORMANCE IMPROVEMENTS IN...
- Publication number 20220044908
- Publication date Feb 10, 2022
- Entegris, Inc.
- Barry Lewis CHAMBERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implantation System with Mixture of Arc Chamber Materials
- Publication number 20210398773
- Publication date Dec 23, 2021
- Entegris, Inc.
- Ying TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY PACKAGES, ADSORBENTS, AND RELATED METHODS
- Publication number 20210370259
- Publication date Dec 2, 2021
- Entegris, Inc.
- Lawrence H. Dubois
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATI...
- Publication number 20210189550
- Publication date Jun 24, 2021
- Entegris, Inc.
- Oleg BYL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA IMMERSION METHODS FOR ION IMPLANTATION
- Publication number 20210090860
- Publication date Mar 25, 2021
- Entegris, Inc.
- Ying TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM WITH MIXTURE OF ARC CHAMBER MATERIALS
- Publication number 20210020402
- Publication date Jan 21, 2021
- Entegris, Inc.
- Ying TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE ASSEMBLIES AND FLUID STORAGE AND DISPENSING PACKAGES COMPRISI...
- Publication number 20200248873
- Publication date Aug 6, 2020
- Entegris, Inc.
- Daniel ELZER
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
ADSORBENTS AND FLUID SUPPLY PACKAGES AND APPARATUS COMPRISING SAME
- Publication number 20200206717
- Publication date Jul 2, 2020
- Entegris, Inc.
- Lawrence H. Dubois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION PROCESSES AND APPARATUS USING GALLIUM
- Publication number 20200083015
- Publication date Mar 12, 2020
- Entegris, Inc.
- Joseph D. SWEENEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON MATERIALS FOR CARBON IMPLANTATION
- Publication number 20200051819
- Publication date Feb 13, 2020
- Entegris, Inc.
- Joseph D. SWEENEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOSPHORUS OR ARSENIC ION IMPLANTATION UTILIZING ENHANCED SOURCE TE...
- Publication number 20190103275
- Publication date Apr 4, 2019
- Entegris, Inc.
- Oleg Byl
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
B2F4 MANUFACTURING PROCESS
- Publication number 20190071313
- Publication date Mar 7, 2019
- Entegris, Inc.
- Oleg Byl
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERF...
- Publication number 20180211839
- Publication date Jul 26, 2018
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE ASSEMBLIES AND FLUID STORAGE AND DISPENSING PACKAGES COMPRISI...
- Publication number 20180119888
- Publication date May 3, 2018
- Entegris, Inc.
- Daneil ELZER
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
ION IMPLANTATION PROCESSES AND APPARATUS
- Publication number 20170338075
- Publication date Nov 23, 2017
- Entegris, Inc.
- Oleg BYL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluorinated compositions for ion source performance improvements in...
- Publication number 20170330726
- Publication date Nov 16, 2017
- Entegris, Inc.
- Barry Lewis Chambers
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PHOSPHORUS OR ARSENIC ION IMPLANTATION UTILIZING ENHANCED SOURCE TE...
- Publication number 20170250084
- Publication date Aug 31, 2017
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON MATERIALS FOR CARBON IMPLANTATION
- Publication number 20170069499
- Publication date Mar 9, 2017
- Entegris, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURS...
- Publication number 20160211137
- Publication date Jul 21, 2016
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE DELIVERY OF CHEMICAL REAGENTS
- Publication number 20160172164
- Publication date Jun 16, 2016
- Entegris, Inc.
- Joseph D. Sweeney
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Systems and methods for storing molecular diborane

Method and systems useful for producing aluminum ions

Germanium tetraflouride and hydrogen mixtures for an ion implantati...

Ion implantation system with mixture of arc chamber materials

Plasma immersion methods for ion implantation

Germanium tetraflouride and hydrogen mixtures for an ion implantati...

Ion implantation system with mixture of arc chamber materials

Silicon implantation in substrates and provision of silicon precurs...

Ion implantation processes and apparatus using gallium

Ion implantation processes and apparatus

Carbon materials for carbon implantation

Carbon dopant gas and co-flow for implant beam and source life perf...

Phosphorus or arsenic ion implantation utilizing enhanced source te...

Preparation of high pressure BF3/H2 mixtures

Ion source cleaning in semiconductor processing systems

Carbon dopant gas and co-flow for implant beam and source life perf...

B2F4 manufacturing process

Ion implantation compositions, systems, and methods

Apparatus and method for preparation of compounds or intermediates...

Isotopically-enriched boron-containing compounds, and methods of ma...

Cluster ion implantation of arsenic and phosphorus

Apparatus and method for preparation of compounds or intermediates...

Isotopically-enriched boron-containing compounds, and methods of ma...

Ion implantation system and method

Ion implantation system and method

Cleaning of semiconductor processing systems

Isotopically-enriched boron-containing compounds, and methods of ma...

Isotopically-enriched boron-containing compounds, and methods of ma...

Isotopically-enriched boron-containing compounds, and methods of ma...

Patents Applicationslast 30 patents

METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS

SYSTEMS AND METHODS FOR STORING MOLECULAR DIBORANE

STORAGE AND DELIVERY VESSEL FOR STORING GeH4, USING A ZEOLITIC ADSO...

ADSORBENT-TYPE STORAGE AND DELIVERY VESSELS WITH HIGH PURITY DELIVE...

VESSELS AND METHODS FOR STORING AND DELIVERY A REAGENT

METAL-ORGANIC-FRAMEWORK-CONTAINING BODIES AND RELATED METHODS

GAS STORAGE SYSTEMS AND METHOD THEREOF

GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATI...

Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adso...

Method and Systems Useful for Producing Aluminum Ions

FLUORINATED COMPOSITIONS FOR ION SOURCE PERFORMANCE IMPROVEMENTS IN...

Ion Implantation System with Mixture of Arc Chamber Materials

GAS SUPPLY PACKAGES, ADSORBENTS, AND RELATED METHODS

GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATI...

PLASMA IMMERSION METHODS FOR ION IMPLANTATION

ION IMPLANTATION SYSTEM WITH MIXTURE OF ARC CHAMBER MATERIALS

VALVE ASSEMBLIES AND FLUID STORAGE AND DISPENSING PACKAGES COMPRISI...

ADSORBENTS AND FLUID SUPPLY PACKAGES AND APPARATUS COMPRISING SAME

ION IMPLANTATION PROCESSES AND APPARATUS USING GALLIUM

CARBON MATERIALS FOR CARBON IMPLANTATION

PHOSPHORUS OR ARSENIC ION IMPLANTATION UTILIZING ENHANCED SOURCE TE...

B2F4 MANUFACTURING PROCESS

CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERF...

VALVE ASSEMBLIES AND FLUID STORAGE AND DISPENSING PACKAGES COMPRISI...

ION IMPLANTATION PROCESSES AND APPARATUS

Fluorinated compositions for ion source performance improvements in...

PHOSPHORUS OR ARSENIC ION IMPLANTATION UTILIZING ENHANCED SOURCE TE...

CARBON MATERIALS FOR CARBON IMPLANTATION

SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURS...

REMOTE DELIVERY OF CHEMICAL REAGENTS