Oleh Khodykin

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
EUV light source components and methods for producing, using and re...
- Patent number 8,686,370
- Issue date Apr 1, 2014
- Cymer, LLC
- Norbert R. Bowering
- B82 - NANO-TECHNOLOGY
Information Patent Grant
LPP EUV light source drive laser system
- Patent number 8,461,560
- Issue date Jun 11, 2013
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source components and methods for producing, using and re...
- Patent number 8,314,398
- Issue date Nov 20, 2012
- Cymer, Inc.
- Norbert R. Bowering
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Laser produced plasma EUV light source
- Patent number 8,035,092
- Issue date Oct 11, 2011
- Cymer, Inc.
- Alexander N. Bykanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
EUV light source components and methods for producing, using and re...
- Patent number 7,960,701
- Issue date Jun 14, 2011
- Cymer, Inc.
- Norbert R. Bowering
- B82 - NANO-TECHNOLOGY
Information Patent Grant
LPP EUV light source drive laser system
- Patent number 7,928,417
- Issue date Apr 19, 2011
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for target material delivery in a laser produce...
- Patent number 7,872,245
- Issue date Jan 18, 2011
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for reducing the influence of plasma-generated...
- Patent number 7,732,793
- Issue date Jun 8, 2010
- Cymer, Inc.
- Alexander I. Ershov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Laser produced plasma EUV light source
- Patent number 7,671,349
- Issue date Mar 2, 2010
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source
- Patent number 7,642,533
- Issue date Jan 5, 2010
- Cymer, Inc.
- William N. Partio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
LPP EUV plasma source material target delivery system
- Patent number 7,589,337
- Issue date Sep 15, 2009
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Drive laser delivery systems for EUV light source
- Patent number 7,491,954
- Issue date Feb 17, 2009
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
LPP EUV light source drive laser system
- Patent number 7,482,609
- Issue date Jan 27, 2009
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alternative fuels for EUV light source
- Patent number 7,465,946
- Issue date Dec 16, 2008
- Cymer, Inc.
- Norbert R. Bowering
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
LPP EUV light source drive laser system
- Patent number 7,439,530
- Issue date Oct 21, 2008
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
LPP EUV drive laser input system
- Patent number 7,402,825
- Issue date Jul 22, 2008
- Cymer, Inc.
- Rodney D. Simmons
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Source material dispenser for EUV light source
- Patent number 7,378,673
- Issue date May 27, 2008
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
LPP EUV plasma source material target delivery system
- Patent number 7,372,056
- Issue date May 13, 2008
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source
- Patent number 7,368,741
- Issue date May 6, 2008
- Cymer, Inc.
- Stephan T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source collector lifetime improvements
- Patent number 7,365,349
- Issue date Apr 29, 2008
- Cymer, Inc.
- William N. Partlo
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Discharge produced plasma EUV light source
- Patent number 7,180,081
- Issue date Feb 20, 2007
- Cymer, Inc.
- John Walker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Systems for protecting internal components of an EUV light source f...
- Patent number 7,109,503
- Issue date Sep 19, 2006
- Cymer, Inc.
- Norbert R. Bowering
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light source
- Patent number 6,972,421
- Issue date Dec 6, 2005
- Cymer, Inc.
- Stephan T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma focus light source with improved pulse power system
- Patent number 6,815,700
- Issue date Nov 9, 2004
- Cymer, Inc.
- Stephan T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
EUV Light Source Components and Methods for Producing, Using and Re...
- Publication number 20130070332
- Publication date Mar 21, 2013
- Cymer, Inc.
- Norbert R. Bowering
- B82 - NANO-TECHNOLOGY
Information Patent Application
EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND RE...
- Publication number 20110192985
- Publication date Aug 11, 2011
- Norbert R. Bowering
- G02 - OPTICS
Information Patent Application
LPP EUV Light Source Drive Laser System
- Publication number 20110192995
- Publication date Aug 11, 2011
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source
- Publication number 20100176313
- Publication date Jul 15, 2010
- Cymer, Inc.
- Stephan T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser produced plasma EUV light source
- Publication number 20100127186
- Publication date May 27, 2010
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Drive laser delivery systems for euv light source
- Publication number 20090267005
- Publication date Oct 29, 2009
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Systems and methods for target material delivery in a laser produce...
- Publication number 20090230326
- Publication date Sep 17, 2009
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV light source components and methods for producing, using and re...
- Publication number 20090159808
- Publication date Jun 25, 2009
- Cymer, Inc.
- Norbert R. Bowering
- G02 - OPTICS
Information Patent Application
LPP EUV light source drive laser system
- Publication number 20090095925
- Publication date Apr 16, 2009
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LPP EUV plasma source material target delivery system
- Publication number 20080179549
- Publication date Jul 31, 2008
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser produced plasma EUV light source
- Publication number 20080179548
- Publication date Jul 31, 2008
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Drive laser delivery systems for EUV light source
- Publication number 20080087847
- Publication date Apr 17, 2008
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source
- Publication number 20080023657
- Publication date Jan 31, 2008
- Cymer, Inc.
- Stephen T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Systems and methods for reducing the influence of plasma-generated...
- Publication number 20070187627
- Publication date Aug 16, 2007
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV light source collector lifetime improvements
- Publication number 20070023705
- Publication date Feb 1, 2007
- Cymer, Inc.
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LPP EUV plasma source material target delivery system
- Publication number 20070001130
- Publication date Jan 4, 2007
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LPP EUV light source drive laser system
- Publication number 20070001131
- Publication date Jan 4, 2007
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LPP EUV drive laser input system
- Publication number 20060289806
- Publication date Dec 28, 2006
- Cymer, Inc.
- Rodney D. Simmons
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser produced plasma EUV light source with pre-pulse
- Publication number 20060255298
- Publication date Nov 16, 2006
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Alternative fuels for EUV light source
- Publication number 20060249699
- Publication date Nov 9, 2006
- Cymer, Inc.
- Norbert R. Bowering
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE F...
- Publication number 20060192151
- Publication date Aug 31, 2006
- Cymer, Inc.
- Norbert R. Bowering
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LPP EUV light source drive laser system
- Publication number 20060192152
- Publication date Aug 31, 2006
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Source material dispenser for EUV light source
- Publication number 20060192153
- Publication date Aug 31, 2006
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Systems and methods for reducing the influence of plasma-generated...
- Publication number 20050269529
- Publication date Dec 8, 2005
- Cymer, Inc.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source
- Publication number 20050230645
- Publication date Oct 20, 2005
- Cymer, Inc.
- Stephan T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source
- Publication number 20040108473
- Publication date Jun 10, 2004
- Stephan T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma focus light source with improved pulse power system
- Publication number 20030006383
- Publication date Jan 9, 2003
- Stephan T. Melnychuk
- B82 - NANO-TECHNOLOGY

Oleh Khodykin

Person

Patents Grantslast 30 patents

EUV light source components and methods for producing, using and re...

LPP EUV light source drive laser system

EUV light source components and methods for producing, using and re...

Laser produced plasma EUV light source

EUV light source components and methods for producing, using and re...

LPP EUV light source drive laser system

Systems and methods for target material delivery in a laser produce...

Systems and methods for reducing the influence of plasma-generated...

Laser produced plasma EUV light source

Extreme ultraviolet light source

LPP EUV plasma source material target delivery system

Drive laser delivery systems for EUV light source

LPP EUV light source drive laser system

Alternative fuels for EUV light source

LPP EUV light source drive laser system

LPP EUV drive laser input system

Source material dispenser for EUV light source

LPP EUV plasma source material target delivery system

Extreme ultraviolet light source

EUV light source collector lifetime improvements

Discharge produced plasma EUV light source

Systems for protecting internal components of an EUV light source f...

Extreme ultraviolet light source

Plasma focus light source with improved pulse power system

Patents Applicationslast 30 patents

EUV Light Source Components and Methods for Producing, Using and Re...

EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND RE...

LPP EUV Light Source Drive Laser System

Extreme ultraviolet light source

Laser produced plasma EUV light source

Drive laser delivery systems for euv light source

Systems and methods for target material delivery in a laser produce...

EUV light source components and methods for producing, using and re...

LPP EUV light source drive laser system

LPP EUV plasma source material target delivery system

Laser produced plasma EUV light source

Drive laser delivery systems for EUV light source

Extreme ultraviolet light source

Systems and methods for reducing the influence of plasma-generated...

EUV light source collector lifetime improvements

LPP EUV plasma source material target delivery system

LPP EUV light source drive laser system

LPP EUV drive laser input system

Laser produced plasma EUV light source with pre-pulse

Alternative fuels for EUV light source

SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE F...

LPP EUV light source drive laser system

Source material dispenser for EUV light source

Systems and methods for reducing the influence of plasma-generated...

Extreme ultraviolet light source

Extreme ultraviolet light source

Plasma focus light source with improved pulse power system