Osamu Tanitsu

Person

Chiyoda-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Spatial light modulator unit, illumination optical system, exposure...
- Patent number 10,768,409
- Issue date Sep 8, 2020
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, device production...
- Patent number 10,691,026
- Issue date Jun 23, 2020
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,241,417
- Issue date Mar 26, 2019
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,234,770
- Issue date Mar 19, 2019
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Spatial light modulator unit, illumination optical system, exposure...
- Patent number 10,203,496
- Issue date Feb 12, 2019
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, device production...
- Patent number 10,175,583
- Issue date Jan 8, 2019
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,120,291
- Issue date Nov 6, 2018
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,031,425
- Issue date Jul 24, 2018
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 10,025,194
- Issue date Jul 17, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,007,194
- Issue date Jun 26, 2018
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,989,865
- Issue date Jun 5, 2018
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical unit, illumination optical apparatus, exposure apparatus, a...
- Patent number 9,857,599
- Issue date Jan 2, 2018
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial light modulator unit, illumination optical system, exposure...
- Patent number 9,817,229
- Issue date Nov 14, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,684,247
- Issue date Jun 20, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,684,246
- Issue date Jun 20, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus, illumination method, exposure apparatus, an...
- Patent number 9,678,332
- Issue date Jun 13, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, device production...
- Patent number 9,599,905
- Issue date Mar 21, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,513,558
- Issue date Dec 6, 2016
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,429,848
- Issue date Aug 30, 2016
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,423,694
- Issue date Aug 23, 2016
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Illumination optical system, exposure apparatus, optical element an...
- Patent number 9,366,970
- Issue date Jun 14, 2016
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Spatial light modulator unit, illumination optical system, exposure...
- Patent number 9,341,956
- Issue date May 17, 2016
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Optical unit, illumination optical apparatus, exposure apparatus, a...
- Patent number 9,341,954
- Issue date May 17, 2016
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,140,990
- Issue date Sep 22, 2015
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Illumination apparatus, illumination method, exposure apparatus, an...
- Patent number 9,116,346
- Issue date Aug 25, 2015
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Illumination apparatus, illumination method, exposure apparatus, an...
- Patent number 9,081,189
- Issue date Jul 14, 2015
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, optical element an...
- Patent number 9,057,963
- Issue date Jun 16, 2015
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Optical unit, illumination optical apparatus, exposure apparatus, a...
- Patent number 9,057,877
- Issue date Jun 16, 2015
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Optical unit, illumination optical apparatus, exposure apparatus, a...
- Patent number 9,019,474
- Issue date Apr 28, 2015
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Illumination optical system, aligner, and process for fabricating d...
- Patent number 8,913,227
- Issue date Dec 16, 2014
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...
- Publication number 20190155017
- Publication date May 23, 2019
- Nikon Corporation
- OSAMU TANITSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
- Publication number 20190137887
- Publication date May 9, 2019
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20180348643
- Publication date Dec 6, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20180341185
- Publication date Nov 29, 2018
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...
- Publication number 20180143444
- Publication date May 24, 2018
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Application
SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...
- Publication number 20180067302
- Publication date Mar 8, 2018
- Nikon Corporation
- OSAMU TANITSU
- G02 - OPTICS
Information Patent Application
ILLUMINATION APPARATUS, ILLUMINATION METHOD, EXPOSURE APPARATUS, AN...
- Publication number 20170255005
- Publication date Sep 7, 2017
- Nikon Corporation
- Osamu TANITSU
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20170227854
- Publication date Aug 10, 2017
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
- Publication number 20170184978
- Publication date Jun 29, 2017
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20170082925
- Publication date Mar 23, 2017
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...
- Publication number 20160231558
- Publication date Aug 11, 2016
- Nikon Corporation
- OSAMU TANITSU
- G02 - OPTICS
Information Patent Application
OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...
- Publication number 20160209664
- Publication date Jul 21, 2016
- Nikon Corporation
- Osamu TANITSU
- G02 - OPTICS
Information Patent Application
ILLUMINATION APPARATUS, ILLUMINATION METHOD, EXPOSURE APPARATUS, AN...
- Publication number 20150212424
- Publication date Jul 30, 2015
- Nikon Corporation
- Osamu TANITSU
- G02 - OPTICS
Information Patent Application
OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...
- Publication number 20150192859
- Publication date Jul 9, 2015
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, OPTICAL ELEMENT AN...
- Publication number 20140347645
- Publication date Nov 27, 2014
- Osamu TANITSU
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20140240685
- Publication date Aug 28, 2014
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
- Publication number 20140233008
- Publication date Aug 21, 2014
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
Optical Integrator, Illumination Optical Device, Aligner, and Metho...
- Publication number 20140226211
- Publication date Aug 14, 2014
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
METHOD OF ADJUSTING LIGHTING OPTICAL DEVICE, LIGHTING OPTICAL DEVIC...
- Publication number 20140043594
- Publication date Feb 13, 2014
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20140028990
- Publication date Jan 30, 2014
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20130271945
- Publication date Oct 17, 2013
- Osamu TANITSU
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20130242527
- Publication date Sep 19, 2013
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, OPTICAL ELEMENT AN...
- Publication number 20130229639
- Publication date Sep 5, 2013
- Nikon Corporation
- OSAMU TANITSU
- G02 - OPTICS
Information Patent Application
Exposure Apparatus, Exposure Method, and Method for Producing Device
- Publication number 20130027682
- Publication date Jan 31, 2013
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
- Publication number 20120236285
- Publication date Sep 20, 2012
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...
- Publication number 20120202157
- Publication date Aug 9, 2012
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...
- Publication number 20120178028
- Publication date Jul 12, 2012
- Nikon Corporation
- Osamu TANITSU
- G02 - OPTICS
Information Patent Application
INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR...
- Publication number 20120171627
- Publication date Jul 5, 2012
- Nikon Corporation
- Osamu TANITSU
- G01 - MEASURING TESTING
Information Patent Application
Polarization-modulating element, illumination optical apparatus, ex...
- Publication number 20110273697
- Publication date Nov 10, 2011
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARTUS, EX...
- Publication number 20110261342
- Publication date Oct 27, 2011
- NIKON CORPORATION
- Osamu TANITSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Osamu Tanitsu

Person

Patents Grantslast 30 patents

Spatial light modulator unit, illumination optical system, exposure...

Illumination optical system, exposure apparatus, device production...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Spatial light modulator unit, illumination optical system, exposure...

Illumination optical system, exposure apparatus, device production...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Exposure apparatus, exposure method, and method for producing device

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Optical unit, illumination optical apparatus, exposure apparatus, a...

Spatial light modulator unit, illumination optical system, exposure...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Illumination apparatus, illumination method, exposure apparatus, an...

Illumination optical system, exposure apparatus, device production...

Exposure apparatus, exposure method, and method for producing device

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Illumination optical system, exposure apparatus, optical element an...

Spatial light modulator unit, illumination optical system, exposure...

Optical unit, illumination optical apparatus, exposure apparatus, a...

Polarization-modulating element, illumination optical apparatus, ex...

Illumination apparatus, illumination method, exposure apparatus, an...

Illumination apparatus, illumination method, exposure apparatus, an...

Illumination optical system, exposure apparatus, optical element an...

Optical unit, illumination optical apparatus, exposure apparatus, a...

Optical unit, illumination optical apparatus, exposure apparatus, a...

Illumination optical system, aligner, and process for fabricating d...

Patents Applicationslast 30 patents

SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...

SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...

ILLUMINATION APPARATUS, ILLUMINATION METHOD, EXPOSURE APPARATUS, AN...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...

ILLUMINATION APPARATUS, ILLUMINATION METHOD, EXPOSURE APPARATUS, AN...

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, OPTICAL ELEMENT AN...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...

Optical Integrator, Illumination Optical Device, Aligner, and Metho...

METHOD OF ADJUSTING LIGHTING OPTICAL DEVICE, LIGHTING OPTICAL DEVIC...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, OPTICAL ELEMENT AN...

Exposure Apparatus, Exposure Method, and Method for Producing Device

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, A...

SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE...

INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR...

Polarization-modulating element, illumination optical apparatus, ex...

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARTUS, EX...