Osamu WAKABAYASHI

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser device and electronic device manufacturing method
- Patent number 12,300,962
- Issue date May 13, 2025
- Gigaphoton Inc.
- Takahito Kumazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing device and electronic device manufacturing method
- Patent number 12,237,640
- Issue date Feb 25, 2025
- Gigaphoton Inc.
- Koichi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure system, laser control parameter production method, and ele...
- Patent number 12,216,409
- Issue date Feb 4, 2025
- Gigaphoton Inc.
- Koichi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure system and method for manufacturing electronic devices
- Patent number 12,197,132
- Issue date Jan 14, 2025
- Gigaphoton Inc.
- Koichi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system and electronic device manufacturing method
- Patent number 12,160,085
- Issue date Dec 3, 2024
- Gigaphoton Inc.
- Taisuke Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing device, electronic device manufacturing method
- Patent number 12,111,577
- Issue date Oct 8, 2024
- Gigaphoton Inc.
- Takahito Kumazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method, exposure system, and method for manufacturing elec...
- Patent number 12,105,425
- Issue date Oct 1, 2024
- Gigaphoton Inc.
- Koichi Fujii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser processing apparatus and method for processing workpiece
- Patent number 12,076,815
- Issue date Sep 3, 2024
- Gigaphoton Inc.
- Masashi Shimbori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser radiation system
- Patent number 12,072,507
- Issue date Aug 27, 2024
- Gigaphoton Inc.
- Osamu Wakabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pulse width expansion apparatus and electronic device manufacturing...
- Patent number 12,038,567
- Issue date Jul 16, 2024
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing apparatus, laser processing system, and laser proc...
- Patent number 11,826,852
- Issue date Nov 28, 2023
- Gigaphoton Inc.
- Akira Suwa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Machine learning method, consumable management apparatus, and compu...
- Patent number 11,822,324
- Issue date Nov 21, 2023
- Gigaphoton Inc.
- Kunihiko Abe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser system and electronic device manufacturing method
- Patent number 11,804,697
- Issue date Oct 31, 2023
- Gigaphoton Inc.
- Taisuke Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser radiation system and method for manufacturing electronic device
- Patent number 11,768,362
- Issue date Sep 26, 2023
- Gigaphoton Inc.
- Akiyoshi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system and method for manufacturing electronic device
- Patent number 11,764,541
- Issue date Sep 19, 2023
- Gigaphoton Inc.
- Taisuke Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation method and laser irradiation system
- Patent number 11,710,660
- Issue date Jul 25, 2023
- Gigaphoton Inc.
- Hiroshi Ikenoue
- G02 - OPTICS
Information Patent Grant
Mirror for extreme ultraviolet light and extreme ultraviolet light...
- Patent number 11,614,572
- Issue date Mar 28, 2023
- Gigaphoton Inc.
- Osamu Wakabayashi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,604,416
- Issue date Mar 14, 2023
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus, laser apparatus management system, and laser appar...
- Patent number 11,502,478
- Issue date Nov 15, 2022
- Gigaphoton Inc.
- Hiroyuki Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus for generating extreme ultraviolet light
- Patent number 11,477,877
- Issue date Oct 18, 2022
- Gigaphoton Inc.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Laser apparatus and laser processing system
- Patent number 11,469,568
- Issue date Oct 11, 2022
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing system and laser processing method
- Patent number 11,465,233
- Issue date Oct 11, 2022
- Gigaphoton Inc.
- Kouji Kakizaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser gas regenerating apparatus and electronic device manufacturin...
- Patent number 11,451,003
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Hiroaki Tsushima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Data analyzer, semiconductor manufacturing system, data analysis me...
- Patent number 11,353,857
- Issue date Jun 7, 2022
- Gigaphoton Inc.
- Yutaka Igarashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Maintenance management method for lithography system, maintenance m...
- Patent number 11,353,801
- Issue date Jun 7, 2022
- Gigaphoton Inc.
- Kunihiko Abe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wavelength converter
- Patent number 11,271,360
- Issue date Mar 8, 2022
- Gigaphoton Inc.
- Atsushi Fuchimukai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and method for manufacturing optical element
- Patent number 11,264,773
- Issue date Mar 1, 2022
- Gigaphoton Inc.
- Daisuke Tei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 11,217,962
- Issue date Jan 4, 2022
- Gigaphoton Inc.
- Masaki Arakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,194,255
- Issue date Dec 7, 2021
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus and magnetic bearing control method
- Patent number 11,162,530
- Issue date Nov 2, 2021
- Gigaphoton Inc.
- Masaharu Miki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
LASER PROCESSING APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR...
- Publication number 20250235958
- Publication date Jul 24, 2025
- Gigaphoton Inc.
- Tomonari TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER PROCESSING METHOD, LASER PROCESSING APPARATUS, AND ELECTRONIC...
- Publication number 20250162082
- Publication date May 22, 2025
- Gigaphoton Inc.
- Yasufumi KAWASUJI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LINE NARROWING DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250149847
- Publication date May 8, 2025
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250141172
- Publication date May 1, 2025
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS, METHOD FOR CONTROLLING WAVELENGTH OF LASER LIGHT F...
- Publication number 20240429679
- Publication date Dec 26, 2024
- Gigaphoton Inc.
- Seiji NOGIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
- Publication number 20240429672
- Publication date Dec 26, 2024
- Gigaphoton Inc.
- Seiji NOGIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING APPARATUS AND METHOD FOR PROCESSING WORKPIECE
- Publication number 20240375213
- Publication date Nov 14, 2024
- Gigaphoton Inc.
- Masashi SHIMBORI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING METHOD, LASER DEVICE, AND WAVELENGT...
- Publication number 20240322521
- Publication date Sep 26, 2024
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING SYSTEM, LASER PROCESSING METHOD, AND ELECTRONIC DE...
- Publication number 20240272444
- Publication date Aug 15, 2024
- Gigaphoton Inc.
- Yasufumi KAWASUJI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240235149
- Publication date Jul 11, 2024
- Gigaphoton Inc.
- Hironori IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING APPARATUS, LASER PROCESSING SYSTEM, AND LASER PROC...
- Publication number 20240058894
- Publication date Feb 22, 2024
- Gigaphoton Inc.
- Akira SUWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20240049378
- Publication date Feb 8, 2024
- Gigaphoton Inc.
- Masaki NAKANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE PARAMETER INFORMATION MANAGEMENT METHOD, LIGHT SOURCE...
- Publication number 20240023217
- Publication date Jan 18, 2024
- Gigaphoton Inc.
- Yuji MINEGISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
- Publication number 20230352900
- Publication date Nov 2, 2023
- Gigaphoton Inc.
- Koichi FUJII
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230208094
- Publication date Jun 29, 2023
- Gigaphoton Inc.
- Takahito KUMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230187286
- Publication date Jun 15, 2023
- Gigaphoton Inc.
- Toshihiro OGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE SYSTEM, EXPOSURE METHOD, AND ELECTRONIC DEVICE MANUFACTURI...
- Publication number 20230098685
- Publication date Mar 30, 2023
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWING GAS LASER DEVICE, WAVELENGTH CONTROL METHOD, AND ELE...
- Publication number 20230064314
- Publication date Mar 2, 2023
- Gigaphoton Inc.
- Takahito KUMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE METHOD, EXPOSURE SYSTEM, AND METHOD FOR MANUFACTURING ELEC...
- Publication number 20220390851
- Publication date Dec 8, 2022
- Gigaphoton Inc.
- Koichi FUJII
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LINE NARROWING DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20220385028
- Publication date Dec 1, 2022
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTR...
- Publication number 20220385022
- Publication date Dec 1, 2022
- Gigaphoton Inc.
- Takahito KUMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWING DEVICE, ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20220385027
- Publication date Dec 1, 2022
- Gigaphoton Inc.
- Takahito KUMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...
- Publication number 20220371121
- Publication date Nov 24, 2022
- Gigaphoton Inc.
- Koichi FUJII
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...
- Publication number 20220373893
- Publication date Nov 24, 2022
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
- Publication number 20220373896
- Publication date Nov 24, 2022
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
- Publication number 20220350120
- Publication date Nov 3, 2022
- Gigaphoton Inc.
- Hirotaka MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM
- Publication number 20220050382
- Publication date Feb 17, 2022
- Gigaphoton Inc.
- Koji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20210367390
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Daisuke TEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LA...
- Publication number 20210366710
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Kaname IMOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MACHINE LEARNING METHOD, CONSUMABLE MANAGEMENT APPARATUS, AND COMPU...
- Publication number 20210333788
- Publication date Oct 28, 2021
- Gigaphoton Inc.
- Kunihiko ABE
- G06 - COMPUTING CALCULATING COUNTING

Osamu WAKABAYASHI

Person

Patents Grantslast 30 patents

Laser device and electronic device manufacturing method

Line narrowing device and electronic device manufacturing method

Exposure system, laser control parameter production method, and ele...

Exposure system and method for manufacturing electronic devices

Laser system and electronic device manufacturing method

Line narrowing device, electronic device manufacturing method

Exposure method, exposure system, and method for manufacturing elec...

Laser processing apparatus and method for processing workpiece

Laser radiation system

Pulse width expansion apparatus and electronic device manufacturing...

Laser processing apparatus, laser processing system, and laser proc...

Machine learning method, consumable management apparatus, and compu...

Laser system and electronic device manufacturing method

Laser radiation system and method for manufacturing electronic device

Laser system and method for manufacturing electronic device

Laser irradiation method and laser irradiation system

Mirror for extreme ultraviolet light and extreme ultraviolet light...

Laser processing method and laser processing system

Laser apparatus, laser apparatus management system, and laser appar...

Laser apparatus for generating extreme ultraviolet light

Laser apparatus and laser processing system

Laser processing system and laser processing method

Laser gas regenerating apparatus and electronic device manufacturin...

Data analyzer, semiconductor manufacturing system, data analysis me...

Maintenance management method for lithography system, maintenance m...

Wavelength converter

Laser apparatus and method for manufacturing optical element

Laser system

Laser processing method and laser processing system

Gas laser apparatus and magnetic bearing control method

Patents Applicationslast 30 patents

LASER PROCESSING APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR...

LASER PROCESSING METHOD, LASER PROCESSING APPARATUS, AND ELECTRONIC...

LINE NARROWING DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER APPARATUS, METHOD FOR CONTROLLING WAVELENGTH OF LASER LIGHT F...

LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

LASER PROCESSING APPARATUS AND METHOD FOR PROCESSING WORKPIECE

ELECTRONIC DEVICE MANUFACTURING METHOD, LASER DEVICE, AND WAVELENGT...

LASER PROCESSING SYSTEM, LASER PROCESSING METHOD, AND ELECTRONIC DE...

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER PROCESSING APPARATUS, LASER PROCESSING SYSTEM, AND LASER PROC...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

LIGHT SOURCE PARAMETER INFORMATION MANAGEMENT METHOD, LIGHT SOURCE...

LASER APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

ELECTRONIC DEVICE MANUFACTURING METHOD

EXPOSURE SYSTEM, EXPOSURE METHOD, AND ELECTRONIC DEVICE MANUFACTURI...

LINE NARROWING GAS LASER DEVICE, WAVELENGTH CONTROL METHOD, AND ELE...

EXPOSURE METHOD, EXPOSURE SYSTEM, AND METHOD FOR MANUFACTURING ELEC...

LINE NARROWING DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTR...

LINE NARROWING DEVICE, ELECTRONIC DEVICE MANUFACTURING METHOD

EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...

EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...

EXPOSURE SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...

LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM

GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LA...

MACHINE LEARNING METHOD, CONSUMABLE MANAGEMENT APPARATUS, AND COMPU...