Oscar Hemberg

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La Jolla, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
EUV collector debris management
- Patent number 8,075,732
- Issue date Dec 13, 2011
- Cymer, Inc.
- William N. Partlo
- B08 - CLEANING
Information Patent Grant
Method and apparatus for EUV plasma source target delivery
- Patent number 7,405,416
- Issue date Jul 29, 2008
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
LPP EUV plasma source material target delivery system
- Patent number 7,372,056
- Issue date May 13, 2008
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for EUV light source target material handling
- Patent number 7,122,816
- Issue date Oct 17, 2006
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LPP EUV plasma source material target delivery system
- Publication number 20070001130
- Publication date Jan 4, 2007
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for EUV plasma source target delivery
- Publication number 20060192154
- Publication date Aug 31, 2006
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING
- Publication number 20060192155
- Publication date Aug 31, 2006
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV collector debris management
- Publication number 20060091109
- Publication date May 4, 2006
- William N. Partlo
- B08 - CLEANING