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Oscar K. HSU
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Chelmsford, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-layered chemical-mechanical planarization pad
Patent number
9,796,063
Issue date
Oct 24, 2017
FNS Tech Co., Ltd.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad having micro-grooves on the pad surface
Patent number
9,375,822
Issue date
Jun 28, 2016
FNS Tech Co., Ltd.
Oscar K. Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical planarization pad including patterned structura...
Patent number
9,162,341
Issue date
Oct 20, 2015
FNS Tech Co., Ltd.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad having micro-grooves on the pad surface
Patent number
8,900,036
Issue date
Dec 2, 2014
FNS Tech No., Ltd.
Oscar K. Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Multi-layered chemical-mechanical planarization pad
Patent number
8,790,165
Issue date
Jul 29, 2014
FNS Tech Co., Ltd.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Method of grooving a chemical-mechanical planarization pad
Patent number
8,758,659
Issue date
Jun 24, 2014
FNS Tech Co., Ltd.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization pad with void network
Patent number
8,684,794
Issue date
Apr 1, 2014
FNS Tech Co., Ltd.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Fabric containing non-crimped fibers and methods of manufacture
Patent number
8,546,260
Issue date
Oct 1, 2013
Innopad, Inc.
Oscar K. Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Three-dimensional network in CMP pad
Patent number
8,491,360
Issue date
Jul 23, 2013
Innopad, Inc.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical planarization pad including patterned structura...
Patent number
8,435,099
Issue date
May 7, 2013
Innopad, Inc.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical planarization pad
Patent number
8,430,721
Issue date
Apr 30, 2013
Innopad, Inc.
Oscar K. Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad with controlled void formation
Patent number
8,377,351
Issue date
Feb 19, 2013
Innopad, Inc.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical planarization pad
Patent number
8,172,648
Issue date
May 8, 2012
Innopad, Inc.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad having micro-grooves on the pad surface
Patent number
8,137,166
Issue date
Mar 20, 2012
Innopad, Inc.
Oscar K. Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical planarization pad having end point detection wi...
Patent number
7,985,121
Issue date
Jul 26, 2011
innoPad, Inc.
Paul Lefevre
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pads useful in chemical mechanical polishing of substrate...
Patent number
6,890,244
Issue date
May 10, 2005
Freudenberg Nonwovens Limited Partnership
Oscar K. Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pads with polymer filled fibrous web, and methods for fab...
Patent number
6,712,681
Issue date
Mar 30, 2004
International Business Machines Corporation
Shyng-Tsong Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pads useful in chemical mechanical polishing of substrate...
Patent number
6,656,018
Issue date
Dec 2, 2003
Freudenberg Nonwovens Limited Partnership
Oscar K. Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Multilayered polishing pad, method for fabricating, and use thereof
Patent number
6,383,066
Issue date
May 7, 2002
International Business Machines Corporation
Shyng-Tsong Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad grooving method and apparatus
Patent number
6,340,325
Issue date
Jan 22, 2002
International Business Machines Corporation
Shyng-Tsong Chen
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING PAD HAVING MICRO-GROOVES ON THE PAD SURFACE
Publication number
20150056894
Publication date
Feb 26, 2015
FNS TECH CO., LTD.
Oscar K. HSU
B24 - GRINDING POLISHING
Information
Patent Application
MULTI-LAYERED CHEMICAL-MECHANICAL PLANARIZATION PAD
Publication number
20140311043
Publication date
Oct 23, 2014
Paul LEFEVRE
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL-MECHANICAL PLANARIZATION PAD INCLUDING PATTERNED STRUCTURA...
Publication number
20130244548
Publication date
Sep 19, 2013
Paul LEFEVRE
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING PAD HAVING MICRO-GROOVES ON THE PAD SURFACE
Publication number
20120178348
Publication date
Jul 12, 2012
INNOPAD, INC.
Oscar K. HSU
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF GROOVING A CHEMICAL-MECHANICAL PLANARIZATION PAD
Publication number
20120073210
Publication date
Mar 29, 2012
INNOPAD, INC.
Paul LEFEVRE
B24 - GRINDING POLISHING
Information
Patent Application
FABRIC CONTAINING NON-CRIMPED FIBERS AND METHODS OF MANUFACTURE
Publication number
20110171831
Publication date
Jul 14, 2011
INNOPAD, INC.
Oscar K. Hsu
D04 - BRAIDING LACE-MAKING KNITTING TRIMMINGS NON-WOVEN FABRICS
Information
Patent Application
MULTI-LAYERED CHEMICAL-MECHANICAL PLANARIZATION PAD
Publication number
20100221983
Publication date
Sep 2, 2010
INNOPAD, INC.
Paul LEFEVRE
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL-MECHANICAL PLANARIZATION PAD INCLUDING PATTERNED STRUCTURA...
Publication number
20100221985
Publication date
Sep 2, 2010
INNOPAD, INC.
Paul LEFEVRE
B24 - GRINDING POLISHING
Information
Patent Application
Chemical Mechanical Planarization Pad With Void Network
Publication number
20090258588
Publication date
Oct 15, 2009
INNOPAD, INC.
Oscar K. HSU
B24 - GRINDING POLISHING
Information
Patent Application
Polishing Pad With Controlled Void Formation
Publication number
20090246504
Publication date
Oct 1, 2009
INNOPAD, INC.
Paul LEFEVRE
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL-MECHANICAL PLANARIZATION PAD
Publication number
20090170410
Publication date
Jul 2, 2009
INNOPAD, INC.
Oscar K. HSU
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL-MECHANICAL PLANARIZATION PAD
Publication number
20090170413
Publication date
Jul 2, 2009
INNOPAD, INC.
Oscar K. HSU
B24 - GRINDING POLISHING
Information
Patent Application
Chemical-Mechanical Planarization Pad Having End Point Detection Wi...
Publication number
20090142989
Publication date
Jun 4, 2009
INNOPAD, INC.
Paul Lefevre
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Three-Dimensional Network in CMP Pad
Publication number
20090137121
Publication date
May 28, 2009
INNOPAD, INC.
Oscar K. HSU
B24 - GRINDING POLISHING
Information
Patent Application
Polishing Pad Having Micro-Grooves On The Pad Surface
Publication number
20080085661
Publication date
Apr 10, 2008
INNOPAD, INC.
Oscar K. HSU
B24 - GRINDING POLISHING
Information
Patent Application
Polishing Pad
Publication number
20060223424
Publication date
Oct 5, 2006
Jean Vangsness
B24 - GRINDING POLISHING
Information
Patent Application
Fiber embedded polishing pad
Publication number
20060116059
Publication date
Jun 1, 2006
International Business Machines Corporation
Shyng-Tsong Chen
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad
Publication number
20050255794
Publication date
Nov 17, 2005
Jean Vangsness
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pads useful in chemical mechanical polishing of substrate...
Publication number
20040072507
Publication date
Apr 15, 2004
FREUDENBERG NONWOVENS LIMITED PARTNERSHIP
Oscar K. Hsu
B24 - GRINDING POLISHING