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Palani Sakthivel
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Gaithersburg, MD, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and process for treating dielectric materials
Patent number
7,709,814
Issue date
May 4, 2010
Axcelis Technologies, Inc.
Carlo Waldfried
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ashing process
Patent number
6,951,823
Issue date
Oct 4, 2005
Axcelis Technologies, Inc.
Carlo Waldfried
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxygen free plasma stripping process
Patent number
6,638,875
Issue date
Oct 28, 2003
Axcelis Technologies, Inc.
Qingyan Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ashing process
Patent number
6,630,406
Issue date
Oct 7, 2003
Axcelis Technologies
Carlo Waldfried
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ashing process
Patent number
6,548,416
Issue date
Apr 15, 2003
Axcelis Technolgoies, Inc.
Qingyuan Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for removal of photoresist after post ion implantation
Patent number
6,524,936
Issue date
Feb 25, 2003
Axcelis Technologies, Inc.
John Scott Hallock
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for detecting an endpoint for an oxygen free plasma process
Patent number
6,492,186
Issue date
Dec 10, 2002
Eaton Corporation
Qingyan Han
G01 - MEASURING TESTING
Information
Patent Grant
Oxygen free plasma stripping process
Patent number
6,281,135
Issue date
Aug 28, 2001
Axcelis Technologies, Inc.
Qingyuan Han
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and process for treating dielectric materials
Publication number
20060141806
Publication date
Jun 29, 2006
Carlo Waldfried
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma ashing process
Publication number
20040084412
Publication date
May 6, 2004
Carlo Waldfried
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Plasma ashing process
Publication number
20030032300
Publication date
Feb 13, 2003
Carlo Waldfried
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ASHING PROCESS
Publication number
20030022511
Publication date
Jan 30, 2003
Qingyuan Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for removal of photoresist after post ion implantation
Publication number
20020151156
Publication date
Oct 17, 2002
John Scott Hallock
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Oxygen free plasma stripping process
Publication number
20010027016
Publication date
Oct 4, 2001
Axcelis Technologies, Inc.
Qingyan Han
H01 - BASIC ELECTRIC ELEMENTS