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Palanikumaran Sakthievel
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Gaithersburg, MD, US
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last 30 patents
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Patent Grant
Method and apparatus for micro-jet enabled, low energy ion generati...
Patent number
7,037,846
Issue date
May 2, 2006
Axcelis Technologies, Inc.
Aseem Kumar Srivastava
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and apparatus for micro-jet enabled, low-energy ion generati...
Patent number
6,761,796
Issue date
Jul 13, 2004
Axcelis Technologies, Inc.
Aseem Kumar Srivastava
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for micro-jet enabled, low-energy ion generati...
Publication number
20040140053
Publication date
Jul 22, 2004
Aseem Kumar Srivastava
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for micro-jet enabled, low-energy ion generati...
Publication number
20020144785
Publication date
Oct 10, 2002
Aseem Kumar Srivastava
H01 - BASIC ELECTRIC ELEMENTS