Patrick G. Breiling

Person

Tualatin, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Showerhead faceplate having flow apertures configured for hollow ca...
- Patent number 11,837,443
- Issue date Dec 5, 2023
- Lam Research Corporation
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead faceplate having flow apertures configured for hollow ca...
- Patent number 11,515,124
- Issue date Nov 29, 2022
- Lam Research Corporation
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 11,443,975
- Issue date Sep 13, 2022
- Lam Research Corporation
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chucking pedestal with substrate backside purging and...
- Patent number 11,232,966
- Issue date Jan 25, 2022
- Lam Research Corporation
- Timothy S. Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,101,164
- Issue date Aug 24, 2021
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead faceplate having flow apertures configured for hollow ca...
- Patent number 10,984,987
- Issue date Apr 20, 2021
- Lam Research Corporation
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conical wafer centering and holding device for semiconductor proces...
- Patent number 10,655,224
- Issue date May 19, 2020
- Lam Research Corporation
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 10,622,243
- Issue date Apr 14, 2020
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 10,604,841
- Issue date Mar 31, 2020
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus for in-situ deposition of film stacks
- Patent number 10,214,816
- Issue date Feb 26, 2019
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma suppression behind a showerhead through the use of increased...
- Patent number 9,758,868
- Issue date Sep 12, 2017
- Lam Research Corporation
- Patrick Girard Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for purging and plasma suppression in a proces...
- Patent number 9,399,228
- Issue date Jul 26, 2016
- Novellus Systems, Inc.
- Patrick Breiling
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
In-situ deposition of film stacks
- Patent number 9,028,924
- Issue date May 12, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ deposition of film stacks
- Patent number 8,741,394
- Issue date Jun 3, 2014
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for electroplating including remotely position...
- Patent number 7,854,828
- Issue date Dec 21, 2010
- Novellus Systems, Inc.
- Jonathan Reid
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Active rinse shield for electrofill chemical bath and method of use
- Patent number 7,413,616
- Issue date Aug 19, 2008
- Novellus Systems, Inc.
- Patrick Breiling
- B08 - CLEANING
Information Patent Grant
Active rinse shield for electrofill chemical bath and method of use
- Patent number 7,146,994
- Issue date Dec 12, 2006
- Novellus Systems, Inc.
- Patrick Breiling
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20240112890
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20230366094
- Publication date Nov 16, 2023
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20230099566
- Publication date Mar 30, 2023
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20210371982
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20210210310
- Publication date Jul 8, 2021
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20210013080
- Publication date Jan 14, 2021
- LAM RESEARCH CORPORATION
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20200227304
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20200219757
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Patrick BREILING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20200118795
- Publication date Apr 16, 2020
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20190376186
- Publication date Dec 12, 2019
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND...
- Publication number 20190237353
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Timothy S. THOMAS
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Wafer Edge Contact Hardware and Methods to Eliminate Deposition at...
- Publication number 20180334746
- Publication date Nov 22, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONICAL WAFER CENTERING AND HOLDING DEVICE FOR SEMICONDUCTOR PROCES...
- Publication number 20180171473
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20180163305
- Publication date Jun 14, 2018
- LAM RESEARCH CORPORATION
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20180122685
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SUPPRESSION BEHIND A SHOWERHEAD THROUGH THE USE OF INCREASED...
- Publication number 20170260627
- Publication date Sep 14, 2017
- LAM RESEARCH CORPORATION
- Patrick Girard Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20150013607
- Publication date Jan 15, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL
- Publication number 20140235069
- Publication date Aug 21, 2014
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PURGING AND PLASMA SUPPRESSION IN A PROCES...
- Publication number 20140217193
- Publication date Aug 7, 2014
- Novellus Systems, Inc.
- Patrick Breiling
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20130171834
- Publication date Jul 4, 2013
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-Situ Deposition of Film Stacks
- Publication number 20110236594
- Publication date Sep 29, 2011
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for electroplating
- Publication number 20100032310
- Publication date Feb 11, 2010
- Novellus Systems, Inc.
- Jonathan Reid
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for electroplating including remotely position...
- Publication number 20100032303
- Publication date Feb 11, 2010
- Novellus Systems, Inc.
- Jonathan Reid
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Active rinse shield for electrofill chemical bath and method of use
- Publication number 20070102022
- Publication date May 10, 2007
- Novellus Systems, Inc.
- Patrick Breiling
- B08 - CLEANING
Information Patent Application
Active rinse shield for electrofill chemical bath and method of use
- Publication number 20040182424
- Publication date Sep 23, 2004
- Novellus Systems, Inc.
- Patrick Breiling
- B08 - CLEANING

Patrick G. Breiling

Person

Patents Grantslast 30 patents

Electrostatic chuck with seal surface

Integrated showerhead with thermal control for delivering radical a...

Showerhead faceplate having flow apertures configured for hollow ca...

Integrated showerhead with thermal control for delivering radical a...

Showerhead faceplate having flow apertures configured for hollow ca...

Planar substrate edge contact with open volume equalization pathway...

Electrostatic chucking pedestal with substrate backside purging and...

Integrated showerhead with thermal control for delivering radical a...

Showerhead faceplate having flow apertures configured for hollow ca...

Conical wafer centering and holding device for semiconductor proces...

Planar substrate edge contact with open volume equalization pathway...

Integrated showerhead with thermal control for delivering radical a...

PECVD apparatus for in-situ deposition of film stacks

Plasma suppression behind a showerhead through the use of increased...

Method and apparatus for purging and plasma suppression in a proces...

In-situ deposition of film stacks

In-situ deposition of film stacks

Method and apparatus for electroplating including remotely position...

Active rinse shield for electrofill chemical bath and method of use

Active rinse shield for electrofill chemical bath and method of use

Patents Applicationslast 30 patents

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

ELECTROSTATIC CHUCK WITH SEAL SURFACE

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND...

Wafer Edge Contact Hardware and Methods to Eliminate Deposition at...

CONICAL WAFER CENTERING AND HOLDING DEVICE FOR SEMICONDUCTOR PROCES...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

PLASMA SUPPRESSION BEHIND A SHOWERHEAD THROUGH THE USE OF INCREASED...

IN-SITU DEPOSITION OF FILM STACKS

MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL

METHOD AND APPARATUS FOR PURGING AND PLASMA SUPPRESSION IN A PROCES...

IN-SITU DEPOSITION OF FILM STACKS

In-Situ Deposition of Film Stacks

Method and apparatus for electroplating

Method and apparatus for electroplating including remotely position...

Active rinse shield for electrofill chemical bath and method of use

Active rinse shield for electrofill chemical bath and method of use