Patty Hui-ing Tsai

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Silicon and polycide plasma etch appplications by use of silicon-co...
- Patent number 5,863,839
- Issue date Jan 26, 1999
- Applied Materials, Inc.
- Dale A. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching silicon-containing materials by use of silicon-containing c...
- Patent number 5,705,433
- Issue date Jan 6, 1998
- Applied Materials, Inc.
- Dale A. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching MoSi.sub.2 using SF.sub.6, HBr and O.sub.2
- Patent number 5,354,417
- Issue date Oct 11, 1994
- Applied Materials, Inc.
- Ernest L. Cheung
- H01 - BASIC ELECTRIC ELEMENTS