Paul Aoyagi

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement methodology of advanced nanostructures
- Patent number 11,156,548
- Issue date Oct 26, 2021
- KLA-Tencor Corporation
- Manh Nguyen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automatic determination of fourier harmonic order for computation o...
- Patent number 10,481,088
- Issue date Nov 19, 2019
- KLA-Tencor Corporation
- Mark Backues
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical metrology with reduced sensitivity to grating anomalies
- Patent number 9,470,639
- Issue date Oct 18, 2016
- KLA-Tencor Corporation
- Guorong V. Zhuang
- G01 - MEASURING TESTING
Information Patent Grant
Techniques for optimized scatterometry
- Patent number 9,127,927
- Issue date Sep 8, 2015
- KLA-Tencor Corporation
- Jonathan Iloreta
- G01 - MEASURING TESTING
Information Patent Grant
Film measurement
- Patent number 7,760,358
- Issue date Jul 20, 2010
- KLA-Tencor Corporation
- Paul Aoyagi
- G01 - MEASURING TESTING
Information Patent Grant
Modal method modeling of binary gratings with improved eigenvalue c...
- Patent number 7,375,828
- Issue date May 20, 2008
- KLA-Tencor Corporation
- Paul Aoyagi
- G01 - MEASURING TESTING
Information Patent Grant
Film measurement using reflectance computation
- Patent number 7,362,686
- Issue date Apr 22, 2008
- KLA-Tencor Technologies Corporation
- Paul Aoyagi
- G01 - MEASURING TESTING
Information Patent Grant
Film measurement
- Patent number 7,345,761
- Issue date Mar 18, 2008
- KLA-Tencor Technologies Corporation
- Paul Aoyagi
- G01 - MEASURING TESTING
Information Patent Grant
Film measurement
- Patent number 7,190,453
- Issue date Mar 13, 2007
- KLA-Tencor Technologies Corporation
- Paul Aoyagi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Measurement Methodology of Advanced Nanostructures
- Publication number 20190178788
- Publication date Jun 13, 2019
- KLA-Tencor Corporation
- Manh Nguyen
- G05 - CONTROLLING REGULATING
Information Patent Application
AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION O...
- Publication number 20140358476
- Publication date Dec 4, 2014
- Mark Backues
- G01 - MEASURING TESTING
Information Patent Application
TECHNIQUES FOR OPTIMIZED SCATTEROMETRY
- Publication number 20130158948
- Publication date Jun 20, 2013
- Jonathan Iloreta
- G01 - MEASURING TESTING

Paul Aoyagi

Person

Patents Grantslast 30 patents

Measurement methodology of advanced nanostructures

Automatic determination of fourier harmonic order for computation o...

Optical metrology with reduced sensitivity to grating anomalies

Techniques for optimized scatterometry

Film measurement

Modal method modeling of binary gratings with improved eigenvalue c...

Film measurement using reflectance computation

Film measurement

Film measurement

Patents Applicationslast 30 patents

Measurement Methodology of Advanced Nanostructures

AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION O...

TECHNIQUES FOR OPTIMIZED SCATTEROMETRY